Global Patent Index - EP 1906022 A1

EP 1906022 A1 20080402 - Evacuation apparatus

Title (en)

Evacuation apparatus

Title (de)

Entleerungsvorrichtung

Title (fr)

Appareil d'évacuation

Publication

EP 1906022 A1 20080402 (EN)

Application

EP 07018943 A 20070926

Priority

JP 2006270047 A 20060929

Abstract (en)

The present invention discloses an evacuation apparatus for evacuating a tank, a chamber, and the like; wherein a mechanical vacuum booster pump is provided at an up-stream side of an exterior side vacuum pump; wherein the mechanical booster pump has discharge openings for low compression and a discharge opening for discharging a high compression gas; wherein, in case when the exterior side vacuum pump starts discharging a gas, the gas is sent to the exterior side vacuum pump through all of the discharge openings for low compression and the discharge opening for discharging a high compression gas and, in case when the discharged gas pressure reaches afterward an ultimate pressure (a medium vacuum) attainable by the exterior side vacuum pump, the gas is sent to the exterior side vacuum pump only through the discharge opening for discharging a high compression gas.

IPC 8 full level

F04C 18/12 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/06 (2006.01)

CPC (source: EP US)

F04C 18/126 (2013.01 - EP US); F04C 23/005 (2013.01 - EP US); F04C 25/02 (2013.01 - EP US); F04C 28/02 (2013.01 - EP US); F04C 28/06 (2013.01 - EP US); F04C 2220/12 (2013.01 - EP US); F04C 2250/102 (2013.01 - EP US)

Citation (search report)

Designated contracting state (EPC)

DE FR GB

Designated extension state (EPC)

AL BA HR MK YU

DOCDB simple family (publication)

EP 1906022 A1 20080402; CN 101230858 A 20080730; JP 2008088879 A 20080417; US 2008080984 A1 20080403

DOCDB simple family (application)

EP 07018943 A 20070926; CN 200710167655 A 20070929; JP 2006270047 A 20060929; US 86100507 A 20070925