EP 1906023 A1 20080402 - Evacuation apparatus
Title (en)
Evacuation apparatus
Title (de)
Entleerungsvorrichtung
Title (fr)
Appareil d'évacuation
Publication
Application
Priority
JP 2006270048 A 20060929
Abstract (en)
The present invention proposes an evacuation apparatus including a mechanical booster pump (5), a back pump (3) placed at a down-stream side of the mechanical booster pump in series, the booster pump (5) having discharge openings (27a and 27b) for discharging a low compression gas and a discharge opening (29) for discharging a high compression gas, and, in a stage where gas-discharging is started, the gas is discharged toward the ambient side only through the discharge opening (29) for discharging a high compression gas with the operation of the mechanical booster pump and, in a stage where the discharged gas pressure reaches afterward a medium vacuum, the back pump starts operation and the gas is sent to the back pump only through the discharge openings (27a and 27b) for discharging a low compression gas.
IPC 8 full level
F04C 18/12 (2006.01); F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/06 (2006.01)
CPC (source: EP US)
F04C 18/126 (2013.01 - EP US); F04C 23/005 (2013.01 - EP US); F04C 25/02 (2013.01 - EP US); F04C 28/02 (2013.01 - EP US); F04C 28/06 (2013.01 - EP US); F04C 2220/12 (2013.01 - EP US); F04C 2250/102 (2013.01 - EP US)
Citation (search report)
- [A] EP 1596066 A1 20051116 - VARIAN INC [US]
- [A] EP 0730093 A1 19960904 - IWATA AIR COMPRESSOR MFG [JP]
- [A] US 2004173312 A1 20040909 - SHIBAYAMA KOUJI [JP], et al
- [A] EP 1536140 A1 20050601 - AISIN SEIKI [JP]
Designated contracting state (EPC)
DE FR GB
Designated extension state (EPC)
AL BA HR MK YU
DOCDB simple family (publication)
EP 1906023 A1 20080402; CN 101153585 A 20080402; JP 2008088880 A 20080417; US 2008080982 A1 20080403
DOCDB simple family (application)
EP 07018944 A 20070926; CN 200710182193 A 20070929; JP 2006270048 A 20060929; US 86133707 A 20070926