EP 1913331 A1 20080423 - TOMOGRAPHIC IMAGING BY AN INTERFEROMETRIC IMMERSION MICROSCOPE
Title (en)
TOMOGRAPHIC IMAGING BY AN INTERFEROMETRIC IMMERSION MICROSCOPE
Title (de)
TOMOGRAFISCHE BILDGEBUNG MIT INTERFEROMETRISCHEM IMMERSIONSMIKROSKOP
Title (fr)
IMAGERIE TOMOGRAPH I QUE PAR MICROSCOPE INTERFÉROMÉTRIQUE À IMMERSION
Publication
Application
Priority
- FR 2006001909 W 20060804
- FR 0508428 A 20050808
Abstract (en)
[origin: WO2007017589A1] The invention relates to a device for tomographically imaging an image object comprising a light source whose coherence length is substantially equal to the thickness of the image object slice and an interferometric imaging system which consists of at least one objective lens, reference mirror, and light beam separating means. Said invention is characterised in that the interferometric system is arranged in such a way that the objective lens defines a first focus setting plane at the level of the analysable object layer and a second focus setting plane defines it at the level of the reference mirror, said interferometric system comprises at least one type of compensating medium positioned between said second focus setting plane and separating means, the thickness and optical index of the compensating medium are selected in such a way that the optical path of a light beam emitted from the light source between the first focus setting plane and separating means is substantially equal to the optical path of a light beam between the second focus setting plane and separating means and the dispersion between the first focus setting plane and separating means is substantially equal to the dispersion between the second focus setting plane and separating means.
IPC 8 full level
G01B 9/02 (2006.01)
CPC (source: EP US)
G01B 9/02057 (2013.01 - EP US); G01B 9/02058 (2013.01 - EP US); G01B 9/02091 (2013.01 - EP US); G02B 21/14 (2013.01 - EP US); G02B 21/33 (2013.01 - EP US)
Citation (search report)
See references of WO 2007017589A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2889584 A1 20070209; FR 2889584 B1 20080711; CA 2617983 A1 20070215; CN 101243298 A 20080813; EP 1913331 A1 20080423; JP 2009505051 A 20090205; US 2008246972 A1 20081009; WO 2007017589 A1 20070215
DOCDB simple family (application)
FR 0508428 A 20050808; CA 2617983 A 20060804; CN 200680029559 A 20060804; EP 06794295 A 20060804; FR 2006001909 W 20060804; JP 2008525598 A 20060804; US 99792906 A 20060804