EP 1920453 A2 20080514 - METHOD FOR THE PRODUCTION OF A MULTILAYER ELECTROSTATIC LENS ARRAY
Title (en)
METHOD FOR THE PRODUCTION OF A MULTILAYER ELECTROSTATIC LENS ARRAY
Title (de)
VERFAHREN ZUM HERSTELLEN EINER MEHRSCHICHTIGEN ELEKTROSTATISCHEN LINSENANORDNUNG
Title (fr)
PROCEDE DE FABRICATION D'UN ENSEMBLE LENTILLES ELECTROSTATIQUE A PLUSIEURS COUCHES
Publication
Application
Priority
- EP 2006007780 W 20060805
- DE 102005040267 A 20050824
Abstract (en)
[origin: WO2007022862A2] The invention relates to a method for producing a multilayer electrostatic lens array comprising at least one lens electrode, particularly a method for producing a phase plate, as well as said lens array, said phase plate, and a transmission electron microscope encompassing said phase plate. The lens array or the phase plate is produced from a thin unsupported silicon nitride membrane that is mounted into a macroscopic chip while additional layers are deposited. The central bore and the aperture opening are milled out by means of an ion beam.
IPC 8 full level
H01J 37/12 (2006.01); H01J 37/26 (2006.01)
CPC (source: EP US)
H01J 37/12 (2013.01 - EP US); H01J 37/26 (2013.01 - EP US); H01J 37/263 (2013.01 - EP US); H01J 2237/226 (2013.01 - EP US); H01J 2237/2614 (2013.01 - EP US); H01J 2237/31749 (2013.01 - EP US); Y10T 29/49117 (2015.01 - EP US)
Citation (search report)
See references of WO 2007022862A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102005040267 A1 20070301; DE 102005040267 B4 20071227; EP 1920453 A2 20080514; JP 2009506485 A 20090212; US 2010065741 A1 20100318; US 8487268 B2 20130716; WO 2007022862 A2 20070301; WO 2007022862 A3 20070503
DOCDB simple family (application)
DE 102005040267 A 20050824; EP 06776643 A 20060805; EP 2006007780 W 20060805; JP 2008527336 A 20060805; US 99090706 A 20060805