EP 1925400 B1 20120606 - Carrier ring for carrier head
Title (en)
Carrier ring for carrier head
Title (de)
Trägerring für einen Trägerkopf
Title (fr)
Bague support pour tête de support
Publication
Application
Priority
- US 86709006 P 20061122
- US 89170507 P 20070226
- US 74167707 A 20070427
Abstract (en)
[origin: EP1925400A1] A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion (431) and an annular lower portion (432) having a lower surface (433) with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
IPC 8 full level
B24B 37/04 (2012.01)
CPC (source: EP KR US)
B24B 37/04 (2013.01 - KR); B24B 37/32 (2013.01 - EP KR US); H01L 21/304 (2013.01 - KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1925400 A1 20080528; EP 1925400 B1 20120606; CN 101293333 A 20081029; CN 101293333 B 20101208; JP 2008131049 A 20080605; JP 5324775 B2 20131023; KR 100942624 B1 20100217; KR 20080046555 A 20080527; SG 143189 A1 20080627; TW 200833463 A 20080816; TW 201414572 A 20140416; TW I430870 B 20140321; TW I554360 B 20161021; US 2008119119 A1 20080522; US 2010151777 A1 20100617; US 7699688 B2 20100420; US 7901273 B2 20110308
DOCDB simple family (application)
EP 07022414 A 20071119; CN 200710165596 A 20071122; JP 2007298304 A 20071116; KR 20070108344 A 20071026; SG 2007179542 A 20071121; TW 102143866 A 20071121; TW 96144179 A 20071121; US 69891210 A 20100202; US 74167707 A 20070427