EP 1929238 A1 20080611 - INTERFEROMETRIC MEASUREMENT APPARATUS
Title (en)
INTERFEROMETRIC MEASUREMENT APPARATUS
Title (de)
INTERFEROMETRISCHE MESSVORRICHTUNG
Title (fr)
DISPOSITIF DE MESURE INTERFEROMETRIQUE
Publication
Application
Priority
- EP 2006065956 W 20060904
- DE 102005045513 A 20050922
- DE 102006016131 A 20060406
Abstract (en)
[origin: KR20080046207A] The invention which sees layer and with the depth direction with automatic scanning about layer structure the interference plane a wavelength and the scanning system will be able to move, the white light interferometer and/or the low of scanning to have the interferometer and in compliance with pulley being empty is divided the meantime standard empty course leads and standard with from is empty and is guided the meantime the objective water empty course leads and the objective water with from is empty and the object where a measurement at the time of layer structure to the standard cancer and has the joining a company radiation which is guided to the cancer which will bite respects a measurement the interferometer part which is guided from a radiation unit, the standard cancer and the object to photograph the interference radiation which comes back from the cancer which will bite, electric signalWith converts [chwalsanggi] provides a minute description and measurement result the rear for includes the evaluation system which is arranged, with time measures the layer structure which becomes accomplished at the multiple layers which with depth direction are arranged about interferometry system and measurement for method is a thing.
IPC 8 full level
G01B 11/06 (2006.01)
CPC (source: EP KR US)
G01B 9/02004 (2013.01 - EP US); G01B 9/02057 (2013.01 - EP US); G01B 9/02058 (2013.01 - EP US); G01B 9/0209 (2013.01 - EP US); G01B 11/00 (2013.01 - KR); G01B 11/06 (2013.01 - KR); G01B 11/0675 (2013.01 - EP US); G01B 11/25 (2013.01 - KR)
Designated contracting state (EPC)
DE FR GB PL
DOCDB simple family (publication)
DE 102006016131 A1 20070329; EP 1929238 A1 20080611; JP 2009509150 A 20090305; KR 20080046207 A 20080526; US 2009219515 A1 20090903; WO 2007033898 A2 20070329
DOCDB simple family (application)
DE 102006016131 A 20060406; EP 06793175 A 20060904; EP 2006065956 W 20060904; JP 2008531656 A 20060904; KR 20087007012 A 20080321; US 99192106 A 20060904