Title (en)

DEVICE AND METHOD FOR INFLUENCING POLARISATION DISTRIBUTION IN AN OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHY EXPOSURE SYSTEM

Title (de)

VORRICHTUNG UND VERFAHREN ZUR BEEINFLUSSUNG DER POLARISATIONSVERTEILUNG IN EINEM OPTISCHEN SYSTEM, INSBESONDERE IN EINER MIKROLITHOGRAPHISCHEN PROJEKTIONSBELICHTUNGSANLAGE

Title (fr)

DISPOSITIF ET PROCEDE PERMETTANT D'AGIR SUR LA DISTRIBUTION DE LA POLARISATION DANS UN SYSTEME OPTIQUE, NOTAMMENT DANS UNE INSTALLATION D'ECLAIRAGE PAR PROJECTION MICROLITHOGRAPHIQUE

Publication

EP 1932061 A1 20080618 (DE)

Application

EP 06793831 A 20060926

Priority

• EP 2006066749 W 20060926
• US 72336205 P 20051004

Abstract (en)

[origin: WO2007039519A1] The invention relates to a device and method for influencing polarisation distribution in an optical system, in particular in a microlithography exposure system. The inventive device comprises a plurality of polarisation-influencing optical elements which are positioned in such a way that they are displaceable independently from each other on a common plane.

IPC 8 full level

G03F 7/20 (2006.01); G02B 5/30 (2006.01)

CPC (source: EP KR US)

G02B 27/286 (2013.01 - EP KR US); G03F 7/2006 (2013.01 - KR); G03F 7/70191 (2013.01 - KR); G03F 7/70308 (2013.01 - KR); G03F 7/70341 (2013.01 - EP KR US); G03F 7/70566 (2013.01 - EP KR US); G03F 7/70966 (2013.01 - EP KR US)

Citation (search report)

See references of WO 2007039519A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2007039519 A1 20070412; EP 1932061 A1 20080618; JP 2009510794 A 20090312; JP 4920041 B2 20120418; KR 101459157 B1 20141107; KR 20080054381 A 20080617; TW 200734827 A 20070916; TW I418945 B 20131211; US 2008218725 A1 20080911; US 8077289 B2 20111213

DOCDB simple family (application)

EP 2006066749 W 20060926; EP 06793831 A 20060926; JP 2008533973 A 20060926; KR 20087005482 A 20060926; TW 95136887 A 20061004; US 5250708 A 20080320