EP 1933374 B1 20120411 - SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING PROGRAM AND PROGRAM RECORDING MEDIUM
Title (en)
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING PROGRAM AND PROGRAM RECORDING MEDIUM
Title (de)
SUBSTRATREINIGUNGSVORRICHTUNG, SUBSTRATREINIGUNGSVERFAHREN, SUBSTRATREINIGUNGSPROGRAMM UND PROGRAMMAUFZEICHNUNGSMEDIUM
Title (fr)
APPAREIL DE NETTOYAGE DE SUBSTRAT PROCEDE DE NETTOYAGE DE SUBSTRAT, PROGRAMME DE NETTOYAGE DE SUBSTRAT ET SUPPORT D'ENREGISTREMENT DE PROGRAMME
Publication
Application
Priority
- JP 2006318621 W 20060920
- JP 2005292991 A 20051005
Abstract (en)
[origin: EP1933374A1] A substrate cleaning system according to the present invention comprises cleaning devices, and a controller for controlling the driving of the cleaning devices in accordance with driving recipes predetermined. The controller prioritizes the cleaning devices, calculates, on the basis of a driving recipe for a cleaning device having a higher priority and a driving recipe for a cleaning device having a lower priority, a time in which the two cleaning devices can interfere with each other, and sets the calculated time as a waiting time. The cleaning device having the higher priority is made to start cleaning a substrate from a predetermined cleaning-starting position, while the cleaning device having the lower priority is kept waiting in a predetermined waiting position. When or after the waiting time has elapsed since the cleaning device having the higher priority started cleaning, the cleaning device having the lower priority is made to move from the waiting position and start cleaning the substrate.
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP KR US)
B08B 1/32 (2024.01 - EP US); B08B 3/00 (2013.01 - EP US); G02F 1/1303 (2013.01 - EP US); H01L 21/304 (2013.01 - KR); H01L 21/6704 (2013.01 - EP US); H01L 21/67046 (2013.01 - EP US); H01L 21/67051 (2013.01 - EP US); H01L 21/67253 (2013.01 - EP US); G02F 1/1316 (2021.01 - EP US)
Designated contracting state (EPC)
AT DE
DOCDB simple family (publication)
EP 1933374 A1 20080618; EP 1933374 A4 20110105; EP 1933374 B1 20120411; CN 100543942 C 20090923; CN 101283440 A 20081008; JP 2007103741 A 20070419; KR 100928879 B1 20091130; KR 20070088772 A 20070829; SG 165400 A1 20101028; TW 200717630 A 20070501; TW I314756 B 20090911; US 2009260655 A1 20091022; US 8043436 B2 20111025; WO 2007040049 A1 20070412
DOCDB simple family (application)
EP 06810317 A 20060920; CN 200680037320 A 20060920; JP 2005292991 A 20051005; JP 2006318621 W 20060920; KR 20077015564 A 20060920; SG 2010068138 A 20060920; TW 95137187 A 20061005; US 99216406 A 20060920