EP 1934482 A2 20080625 - PUMP APPARATUS FOR SEMICONDUCTOR PROCESSING
Title (en)
PUMP APPARATUS FOR SEMICONDUCTOR PROCESSING
Title (de)
PUMPVORRICHTUNG ZUR BEHANDLUNG VON HALBLEITERN
Title (fr)
APPAREIL DE POMPAGE UTILISE DANS LE TRAITEMENT DES SEMI-CONDUCTEURS
Publication
Application
Priority
- US 2006038197 W 20060928
- US 24474405 A 20051006
Abstract (en)
[origin: US2007081893A1] The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.
IPC 8 full level
F04D 29/04 (2006.01)
CPC (source: EP KR US)
F01C 19/00 (2013.01 - KR); F04D 17/168 (2013.01 - EP US); F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 23/008 (2013.01 - EP US); F04D 29/04 (2013.01 - KR); H01L 21/02 (2013.01 - KR)
Citation (search report)
See references of WO 2007044260A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
US 2007081893 A1 20070412; CN 101501342 A 20090805; EP 1934482 A2 20080625; JP 2009513861 A 20090402; KR 20080056192 A 20080620; TW 200721245 A 20070601; WO 2007044260 A2 20070419; WO 2007044260 A3 20090430
DOCDB simple family (application)
US 24474405 A 20051006; CN 200680037262 A 20060928; EP 06815874 A 20060928; JP 2008534575 A 20060928; KR 20087008282 A 20080404; TW 95137044 A 20061005; US 2006038197 W 20060928