EP 1934578 A1 20080625 - METHOD FOR EXAMINING A MEASUREMENT OBJECT, AND APPARATUS
Title (en)
METHOD FOR EXAMINING A MEASUREMENT OBJECT, AND APPARATUS
Title (de)
VERFAHREN ZUM UNTERSUCHEN EINES MESSOBJEKTES UND VORRICHTUNG
Title (fr)
PROCEDE D'ANALYSE D'UN OBJET A MESURER, ET DISPOSITIF CORRESPONDANT
Publication
Application
Priority
- DE 2006001131 W 20060630
- DE 102005049562 A 20051013
Abstract (en)
[origin: WO2007041976A1] The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device and in which at least one subsection (1) of the measurement object (2, 12) is optically examined, in an observation region associated with an optical measurement system, using the optical measurement system, wherein displacement of the at least one subsection (1) of the measurement object (2, 12) from the observation region, said displacement being caused by the examination by means of scanning probe microscopy, is corrected in such a manner that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged in the observation region again with the aid of an adjusting device which processes data signals which characterize the displacement.
IPC 8 full level
G01Q 60/02 (2010.01); G01Q 10/00 (2010.01); G01Q 10/06 (2010.01); G01Q 30/02 (2010.01); G01Q 30/06 (2010.01); G01Q 60/18 (2010.01)
CPC (source: EP US)
B82Y 35/00 (2013.01 - US); G01Q 10/06 (2013.01 - EP US); G01Q 30/025 (2013.01 - EP US); G01Q 30/06 (2013.01 - EP US)
Citation (search report)
See references of WO 2007041976A1
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
WO 2007041976 A1 20070419; CN 101326433 A 20081217; EP 1934578 A1 20080625; JP 2009511882 A 20090319; US 2009205089 A1 20090813; US 8769711 B2 20140701
DOCDB simple family (application)
DE 2006001131 W 20060630; CN 200680046323 A 20060630; EP 06761735 A 20060630; JP 2008534858 A 20060630; US 8330306 A 20060630