EP 1934663 A1 20080625 - POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS
Title (en)
POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS
Title (de)
MISCHSYSTEME ZUR PROZESSSTEUERUNG AM EINSATZORT UND ENTSPRECHENDE VERFAHREN
Title (fr)
SYSTEMES MELANGEURS DE COMMANDE DE PROCESSUS AU POINT D'UTILISATION ET PROCEDES CORRESPONDANTS
Publication
Application
Priority
- IB 2006002618 W 20060921
- US 72059705 P 20050926
Abstract (en)
[origin: WO2007034304A1] A blender system is provided that maintains a chemical solution bath at desired concentrations. The blender system includes a blender unit (100) configured to receive and blend at least two chemical compounds (e.g., ammonia and hydrogen peroxide) and deliver a solution including a mixture of compounds at selected concentrations to a tank (2) that retains a selected volume of a chemical solution bath. The blender system further includes a controller (110) configured to maintain at least one compound within a selected concentration range in the chemical solution bath. The controller controls at least one of operation of the blender unit to maintain the concentration of the compound within a selected concentration range within the solution delivered to the tank, and a change in flow rate of solution into and out of the tank when a concentration of the compound within the chemical solution bath falls outside of a target range.
IPC 8 full level
G05D 11/13 (2006.01); G05D 21/02 (2006.01); H01L 21/306 (2006.01)
CPC (source: EP KR)
G05D 11/138 (2013.01 - EP); G05D 21/02 (2013.01 - EP KR); H01L 21/306 (2013.01 - KR)
Citation (search report)
See references of WO 2007034304A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007034304 A1 20070329; CN 101273317 A 20080924; EP 1934663 A1 20080625; JP 2009510556 A 20090312; KR 101263537 B1 20130514; KR 20080053941 A 20080616; RU 2008116685 A 20091110
DOCDB simple family (application)
IB 2006002618 W 20060921; CN 200680035427 A 20060921; EP 06808874 A 20060921; JP 2008531810 A 20060921; KR 20087010026 A 20080425; RU 2008116685 A 20060921