EP 1934669 A2 20080625 - SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE
Title (en)
SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE
Title (de)
SYSTEM ZUM TRANSFER EINES VORLAGENTRANSFERKÖRPERS ZWISCHEN EINER BEWEGUNGSBÜHNE UND EINER ANDOCKPLATTE
Title (fr)
SYSTEME POUR TRANSFERER UN CORPS DE TRANSFERT DE GABARIT ENTRE UN ETAGE MOBILE ET UNE PLAQUE D'ASSEMBLAGE
Publication
Application
Priority
- US 2006026366 W 20060706
- US 21176605 A 20050825
- US 21176305 A 20050825
- US 21178505 A 20050825
Abstract (en)
[origin: WO2007024345A2] The present invention is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart 'from the docking plate a first distance; and a body, having first and second opposed sides spaced- apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
IPC 8 full level
G03F 7/00 (2006.01)
CPC (source: EP)
B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007024345 A2 20070301; WO 2007024345 A3 20090430; EP 1934669 A2 20080625; EP 1934669 A4 20091216; TW 200714439 A 20070416; TW I309198 B 20090501
DOCDB simple family (application)
US 2006026366 W 20060706; EP 06786500 A 20060706; TW 95125846 A 20060714