EP 1938364 A1 20080702 - A METHOD FOR FABRICATING NANOGAP AND NANOGAP SENSOR
Title (en)
A METHOD FOR FABRICATING NANOGAP AND NANOGAP SENSOR
Title (de)
VERFAHREN ZUR ERZEUGUNG EINES NANOSPALTS UND NANOSPALTSENSOR
Title (fr)
PROCEDE POUR FABRIQUER UN NANO-INTERVALLE ET CAPTEUR DE NANO-INTERVALLE
Publication
Application
Priority
- KR 2006003517 W 20060905
- KR 20050099585 A 20051021
- KR 20060072981 A 20060802
Abstract (en)
[origin: WO2007046582A1] The present invention relates to a method of fabricating a nanogap and a nanogap sensor, and to a nanogap and a nanogap sensor fabricated using the method. The present invention relates to a method of fabricating a nanogap and a nanogap sensor, which can be realized by an anisotropic etching using a semiconductor manufacturing process. According to the method of present invention, the nanogap and nanogap sensor can be simply and cheaply produced in large quantities.
IPC 8 full level
B81C 1/00 (2006.01)
CPC (source: EP)
B81C 1/00087 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007046582 A1 20070426; EP 1938364 A1 20080702; EP 1938364 A4 20110518
DOCDB simple family (application)
KR 2006003517 W 20060905; EP 06783773 A 20060905