EP 1939329 B1 20110511 - Kit for the manufacture of a process reactor for forming metallic layers on one or more substrate
Title (en)
Kit for the manufacture of a process reactor for forming metallic layers on one or more substrate
Title (de)
Bausatz zur Herstellung eines Prozessreaktors für die Ausbildung metallischer Schichten auf einem oder auf mehreren Substraten
Title (fr)
Lot de pièces pour la fabrication d'un réacteur de procédé pour la formation de couches métalliques sur un ou plusieurs substrats
Publication
Application
Priority
EP 06027073 A 20061229
Abstract (en)
[origin: EP1939329A1] Kit for building a processing reactor for electrolytic deposition of metals on substrates (2) comprises a reactor vessel (3);#a substrate holder (6) near the vessel outlet (4);#an overflow (8);#a trap (10) for liquid from the overflow and a system for feeding it back into the reactor; and#an anode. In addition it contains one or more a flow guide (S);#an electric field adjusting system;#an auxiliary electrode (H);#a screen (B) for directing the field; and an annular sleeve (R) for reducing the diameter of the reactor. An independent claim is included for a method for electrolytic deposition of metals on substrates using the kit to build the reactor vessel.
IPC 8 full level
C25D 5/08 (2006.01); C25D 17/02 (2006.01); C25D 21/18 (2006.01)
CPC (source: EP KR US)
C25D 5/08 (2013.01 - EP KR US); C25D 17/001 (2013.01 - EP KR); C25D 17/007 (2013.01 - EP KR); C25D 17/008 (2013.01 - EP KR); C25D 17/02 (2013.01 - EP KR US); C25D 21/18 (2013.01 - EP KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1939329 A1 20080702; EP 1939329 B1 20110511; AT E509144 T1 20110515; CN 101448983 A 20090603; CN 101448983 B 20121107; KR 101133085 B1 20120424; KR 20080102266 A 20081124; TW 200842210 A 20081101; TW I378157 B 20121201; WO 2008080515 A2 20080710; WO 2008080515 A3 20080912
DOCDB simple family (application)
EP 06027073 A 20061229; AT 06027073 T 20061229; CN 200780017991 A 20071210; EP 2007010739 W 20071210; KR 20087023897 A 20071210; TW 96148749 A 20071219