EP 1944125 A4 20091216 - TOOL WITH SINTERED BODY POLISHING SURFACE AND METHOD OF MANUFACTURING THE SAME
Title (en)
TOOL WITH SINTERED BODY POLISHING SURFACE AND METHOD OF MANUFACTURING THE SAME
Title (de)
WERKZEUG MIT SINTERKÖRPERPOLIERFLÄCHE UND HERSTELLUNGSVERFAHREN DAFÜR
Title (fr)
OUTIL AVEC SURFACE DE POLISSAGE DE CORPS FRITTÉ ET SON PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- JP 2006316737 W 20060825
- JP 2005243529 A 20050825
- JP 2006209236 A 20060731
Abstract (en)
[origin: EP1944125A1] An efficiently processible polishing tool, particularly used for a CMP pad conditioner, capable solving problems in a fixing strength for fixing abrasive grains to a base plate and problems in nonuniform polished surface and a method of effectively manufacturing the polishing tool. The polishing tool (1) comprises a polishing part formed of a super abrasive grain sintered body sintered integrally with the lining material of a cemented carbide. The polishing part comprises a plurality of polishing units (2) with top parts. The top parts are positioned on an approximately same plane. The polishing units (2) are formed by forming a linear groove (3) group in the polishing part.
IPC 8 full level
B24B 37/00 (2006.01); B24B 53/017 (2012.01); B24B 53/12 (2006.01); B24D 3/00 (2006.01)
CPC (source: EP KR US)
B24B 53/017 (2013.01 - EP KR US); B24B 53/12 (2013.01 - EP KR US); B24D 3/00 (2013.01 - KR); B24D 7/00 (2013.01 - EP KR US); Y10T 428/21 (2015.01 - EP US); Y10T 428/24579 (2015.01 - EP US); Y10T 428/24612 (2015.01 - EP US)
Citation (search report)
- No further relevant documents disclosed
- See references of WO 2007023949A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1944125 A1 20080716; EP 1944125 A4 20091216; EP 1944125 B1 20120125; AU 2006282293 A1 20070301; AU 2006282293 B2 20110623; BR PI0615020 A2 20090804; CA 2620407 A1 20070301; CN 101247923 A 20080820; CN 101247923 B 20101208; CN 101693353 A 20100414; IL 189314 A0 20080605; IL 189314 A 20130131; JP 5033630 B2 20120926; JP WO2007023949 A1 20090305; KR 101293461 B1 20130807; KR 20080037693 A 20080430; RU 2008110905 A 20090927; RU 2430827 C2 20111010; TW 200714416 A 20070416; TW I406736 B 20130901; US 2009215366 A1 20090827; WO 2007023949 A1 20070301
DOCDB simple family (application)
EP 06796810 A 20060825; AU 2006282293 A 20060825; BR PI0615020 A 20060825; CA 2620407 A 20060825; CN 200680030735 A 20060825; CN 200910170789 A 20060825; IL 18931408 A 20080205; JP 2006316737 W 20060825; JP 2007532202 A 20060825; KR 20087005076 A 20060825; RU 2008110905 A 20060825; TW 95131436 A 20060825; US 99056206 A 20060825