EP 1948840 A1 20080730 - DEVICE AND METHOD FOR CONTROLLING THE POWER SUPPLIED TO VACUUM VAPORIZATION SOURCES OF METALS AND OTHER
Title (en)
DEVICE AND METHOD FOR CONTROLLING THE POWER SUPPLIED TO VACUUM VAPORIZATION SOURCES OF METALS AND OTHER
Title (de)
VORRICHTUNG UND VERFAHREN ZUR STEUERUNG DES VAKUUMVERDAMPFUNGSQUELLEN VON METALLEN UND ANDEREN ZUGEFÜHRTEN STROMS
Title (fr)
DISPOSITIF ET PROCEDE POUR COMMANDER L'ENERGIE APPLIQUEE A DES SOURCES DE VAPORISATION SOUS VIDE DE METAUX ET AUTRES
Publication
Application
Priority
IT 2005000663 W 20051115
Abstract (en)
[origin: WO2007057925A1] The device includes at least one vaporization source (31) heated by Joule effect due to the passage of an electric current and a powering system of said at least one source, with a control circuit (101) of the power supplied to the source. This circuit includes an inverter, which supplies an essentially sinusoidal voltage to the source (31), the power being regulated by acting on the amplitude of the voltage supplied to the source.
IPC 8 full level
C23C 14/26 (2006.01); C23C 14/54 (2006.01)
CPC (source: EP)
C23C 14/246 (2013.01); C23C 14/26 (2013.01); C23C 14/54 (2013.01); H05B 1/0247 (2013.01)
Citation (search report)
See references of WO 2007057925A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DOCDB simple family (application)
IT 2005000663 W 20051115; EP 05823891 A 20051115