EP 1949465 A1 20080730 - PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
Title (en)
PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
Title (de)
PIEZOAKTOR UND VERFAHREN ZUR HERSTELLUNG DESSELBEN
Title (fr)
ACTIONNEUR PIEZO-ELECTRIQUE ET PROCEDE POUR LE FABRIQUER
Publication
Application
Priority
- EP 2006067612 W 20061020
- DE 102005051289 A 20051026
Abstract (en)
[origin: WO2007048756A1] The invention relates to a piezoelectric actuator and to a method for producing the same having the following steps: providing a plurality of piezoelectric material layers (2) which can be assembled into a stack; applying electrode layers (3) each having a recess (4, 4') to the plurality of piezoelectric material layers, such that an alternating sequence of piezoelectric material layers and electrode layers is formed in the stack, wherein electrode layers with a recess (4) in a first recess zone and electrode layers with a recess (4') in a second recess zone which differs from the first recess zone are alternatingly formed in the stack; and providing a stress-relieving material (5) in the first and second recesses, the stress-relieving material exhibiting electrically insulating properties after the stack is sintered, and preventing the individual material layers from adhering to one another.
IPC 8 full level
H01L 41/083 (2006.01); H01L 41/24 (2006.01); H01L 41/273 (2013.01)
CPC (source: EP US)
H10N 30/053 (2023.02 - EP US); H10N 30/508 (2023.02 - EP US); Y10T 29/42 (2015.01 - EP US); Y10T 29/49126 (2015.01 - EP US); Y10T 29/49155 (2015.01 - EP US); Y10T 29/49163 (2015.01 - EP US)
Citation (search report)
See references of WO 2007048756A1
Citation (examination)
- EP 1930962 A1 20080611 - KYOCERA CORP [JP]
- JP H04352481 A 19921207 - NEC CORP
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
WO 2007048756 A1 20070503; CN 101356661 A 20090128; CN 101356661 B 20111116; DE 102005051289 B3 20070516; EP 1949465 A1 20080730; US 2008315717 A1 20081225; US 2011062830 A1 20110317; US 8132304 B2 20120313
DOCDB simple family (application)
EP 2006067612 W 20061020; CN 200680039823 A 20061020; DE 102005051289 A 20051026; EP 06807430 A 20061020; US 9141506 A 20061020; US 95424510 A 20101124