EP 1951935 A2 20080806 - FURNACE AND METHOD FOR THE MANUFACTURE OF PHOTO-VOLTAIC SOLAR CELLS USING A DIFFUSION PROCESS.
Title (en)
FURNACE AND METHOD FOR THE MANUFACTURE OF PHOTO-VOLTAIC SOLAR CELLS USING A DIFFUSION PROCESS.
Title (de)
OFEN UND VORRICHTUNG ZUR HERSTELLUNG VON PHOTOVOLTAISCHEN SOLARZELLEN NACH EINEM DIFFUSIONSVERFAHREN
Title (fr)
FOUR ET PROCEDE DE FABRICATION DE CELLULES SOLAIRES PHOTOVOLTAIQUES FAISANT APPEL A UN PROCESSUS DE DIFFUSION
Publication
Application
Priority
- NL 2006000556 W 20061107
- NL 1030360 A 20051107
Abstract (en)
[origin: WO2007053016A2] A first aspect of the invention relates to a furnace, comprising : - a furnace pipe, - a positioning device for positioning substrates in the furnace pipe, - at least one heating element for heating the furnace, - a gas injection device. The invention is characterized in that the furnace comprises a cooling device configured to cool gases in the furnace pipe.
IPC 8 full level
C30B 31/12 (2006.01); C30B 31/16 (2006.01); F27B 1/24 (2006.01); F27B 17/00 (2006.01); F27D 7/00 (2006.01); F27D 7/04 (2006.01); F27D 9/00 (2006.01); F27D 11/00 (2006.01); H01L 21/00 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP)
F27B 5/04 (2013.01); F27B 17/0025 (2013.01); H01L 21/67109 (2013.01); H01L 31/18 (2013.01)
Citation (search report)
See references of WO 2007053016A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007053016 A2 20070510; WO 2007053016 A3 20071025; EP 1951935 A2 20080806; NL 1030360 C2 20070508
DOCDB simple family (application)
NL 2006000556 W 20061107; EP 06824251 A 20061107; NL 1030360 A 20051107