EP 1954852 A1 20080813 - CVD REACTOR WITH REPLACEABLE PROCESS CHAMBER COVER
Title (en)
CVD REACTOR WITH REPLACEABLE PROCESS CHAMBER COVER
Title (de)
CVD-REAKTOR MIT AUSWECHSELBARER PROZESSKAMMERDECKE
Title (fr)
REACTEUR DE DEPOT CHIMIQUE EN PHASE VAPEUR COMPORTANT UN COUVERCLE DE CHAMBRE DE TRAITEMENT INTERCHANGEABLE
Publication
Application
Priority
- EP 2006068642 W 20061120
- DE 102005056324 A 20051125
Abstract (en)
[origin: WO2007060143A1] The invention relates to a device for depositing at least one layer on at least one substrate (2), comprising a process chamber arranged inside a reactor housing (1). Said process chamber has a process chamber base formed by a substrate support (4), a process chamber cover (5, 6) opposite the base, and a gas inlet element (7) for allowing a process gas containing layer-producing components to enter. The process chamber cover (5, 6) has a cover plate (6) which is arranged below a cover plate support (5) and which extends substantially across the entire horizontal surface of the substrate support (4). The aim of the invention is to improve operation of the aforementioned device. For this purpose, the gas inlet element (7) located in the lateral center of the process chamber (3) is fed through an opening of the substrate support (4) and the cover plate (6) which is detachably associated with the cover support (5) can be replaced through a lateral opening (9) of the reactor housing (1).
IPC 8 full level
C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01)
CPC (source: EP)
C23C 16/4401 (2013.01); C23C 16/4411 (2013.01); C23C 16/45508 (2013.01); C23C 16/45576 (2013.01)
Citation (search report)
See references of WO 2007060143A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007060143 A1 20070531; DE 102005056324 A1 20070606; EP 1954852 A1 20080813; TW 200728496 A 20070801; TW I402373 B 20130721
DOCDB simple family (application)
EP 2006068642 W 20061120; DE 102005056324 A 20051125; EP 06819598 A 20061120; TW 95143357 A 20061123