EP 1955225 A4 20091104 - METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA
Title (en)
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA
Title (de)
VERFAHREN UND SYSTEME ZUR VERWENDUNG VON ENTWURFSDATEN IN KOMBINATION MIT PRÜFDATEN
Title (fr)
PROCEDES ET SYSTEMES PERMETTANT D'UTILISER DES DONNEES DE CONCEPTION EN COMBINAISON AVEC DES DONNEES D'INSPECTION
Publication
Application
Priority
- US 2006061113 W 20061120
- US 73794705 P 20051118
- US 73829005 P 20051118
- US 56165906 A 20061120
- US 56173506 A 20061120
Abstract (en)
[origin: WO2007120279A2] Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.
IPC 8 full level
CPC (source: EP KR)
G01N 21/9501 (2013.01 - EP KR); G01R 31/31718 (2013.01 - KR); G06F 16/00 (2018.12 - KR); G06T 7/001 (2013.01 - EP KR); H01L 22/12 (2013.01 - KR); G01N 2021/8854 (2013.01 - EP KR); G01R 31/31718 (2013.01 - EP); G06T 2207/30148 (2013.01 - EP KR); H01L 22/12 (2013.01 - EP); H01L 2924/0002 (2013.01 - EP)
Citation (search report)
- [XY] US 5578821 A 19961126 - MEISBERGER DAN [US], et al
- [A] EP 0370322 A2 19900530 - SCHLUMBERGER TECHNOLOGIES INC [US]
- [A] US 2005198602 A1 20050908 - BRANKNER KEITH J [US]
- [Y] O'GORMAN L ET AL: "Subpixel registration using a concentric ring fiducial", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON PATTERN RECOGNITION. ATLANTIC CITY, JUNE 16 - 21, 1990. CONFERENCE A : COMPUTER VISION AND CONFERENCE B : PATTERN RECOGNITION SYSTEMS AND APPLICATIONS; [PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON PAT, vol. ii, 16 June 1990 (1990-06-16), pages 249 - 253, XP010020519, ISBN: 978-0-8186-2062-1
- See references of WO 2007120280A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
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DOCDB simple family (application)
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