EP 1955356 A2 20080813 - ION SOURCES, SYSTEMS AND METHODS

Title (en)

ION SOURCES, SYSTEMS AND METHODS

Title (de)

IONENQUELLEN, SYSTEME UND VERFAHREN

Title (fr)

SOURCES D'IONS, SYSTEMES ET PROCEDES ASSOCIES

Publication

EP 1955356 A2 20080813 (EN)

Application

EP 06837944 A 20061115

Priority

US 2006044729 W 20061115
US 74195605 P 20051202
US 38521506 A 20060320
US 38513606 A 20060320
US 78439006 P 20060320
US 78438806 P 20060320
US 78433106 P 20060320
US 78450006 P 20060320
US 79580606 P 20060428
US 79920306 P 20060509

Abstract (en)

[origin: WO2007067296A2] Ion sources, systems and methods are disclosed.

IPC 8 full level

H01J 37/28 (2006.01)

CPC (source: EP KR)

H01J 9/02 (2013.01 - EP); H01J 37/08 (2013.01 - EP); H01J 37/20 (2013.01 - EP); H01J 37/252 (2013.01 - EP); H01J 37/28 (2013.01 - EP); H01J 37/30 (2013.01 - KR); H01J 37/3056 (2013.01 - EP); H01J 37/3174 (2013.01 - EP); H01L 21/265 (2013.01 - KR); H01L 21/3065 (2013.01 - KR); H01J 2237/024 (2013.01 - EP); H01J 2237/0807 (2013.01 - EP); H01J 2237/202 (2013.01 - EP); H01J 2237/20228 (2013.01 - EP); H01J 2237/20264 (2013.01 - EP); H01J 2237/2566 (2013.01 - EP); H01J 2237/2623 (2013.01 - EP); H01J 2237/2812 (2013.01 - EP); H01J 2237/30438 (2013.01 - EP); H01J 2237/30477 (2013.01 - EP); H01J 2237/31737 (2013.01 - EP); H01J 2237/3174 (2013.01 - EP); H01J 2237/31755 (2013.01 - EP)

Citation (search report)

See references of WO 2007067328A2

Citation (examination)

US 5637879 A 19970610 - SCHUELER BRUNO W [US]
EP 0477992 A2 19920401 - SHIMADZU CORP [JP]
US 4697086 A 19870929 - ISHITANI TOHRU [JP], et al
JP S52142580 A 19771128 - HITACHI LTD
JP S63105452 A 19880510 - HITACHI LTD, et al
MEINGAILIS J: "FOCUSED ION BEAM TECHNOLOGY AND APPLICATIONS", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICSPROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US LNKD- DOI:10.1116/1.583937, vol. 5, no. 2, 1 March 1987 (1987-03-01), pages 469 - 495, XP008071146, ISSN: 0734-211X

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

DOCDB simple family (publication)

WO 2007067296 A2 20070614; WO 2007067296 A8 20080529; CN 101882551 A 20101110; CN 101882551 B 20131002; CN 102324365 A 20120118; CN 102324365 B 20140716; CN 102364659 A 20120229; CN 102364659 B 20160601; EP 1955348 A2 20080813; EP 1955348 B1 20170712; EP 1955349 A2 20080813; EP 1955350 A2 20080813; EP 1955350 B1 20180725; EP 1955351 A2 20080813; EP 1955351 B1 20190821; EP 1955353 A2 20080813; EP 1955354 A2 20080813; EP 1955355 A2 20080813; EP 1955356 A2 20080813; EP 1974365 A2 20081001; EP 1974365 B1 20190821; EP 2416342 A2 20120208; EP 2416342 A3 20130605; EP 2416342 B1 20160629; EP 2416343 A2 20120208; EP 2416343 A3 20130605; EP 2416343 B1 20190102; EP 2416344 A2 20120208; EP 2416344 A3 20130605; EP 2416344 B1 20170308; EP 2418674 A2 20120215; EP 2418674 A3 20130605; EP 2418674 B1 20190313; JP 2009517838 A 20090430; JP 2009517839 A 20090430; JP 2009517840 A 20090430; JP 2009517841 A 20090430; JP 2009517842 A 20090430; JP 2009517843 A 20090430; JP 2009517844 A 20090430; JP 2009517845 A 20090430; JP 2009517846 A 20090430; JP 2012074383 A 20120412; JP 2012098293 A 20120524; JP 2012098294 A 20120524; JP 2012138360 A 20120719; JP 2012142292 A 20120726; JP 2012248540 A 20121213; JP 5043855 B2 20121010; JP 5155874 B2 20130306; JP 5173828 B2 20130403; JP 5193053 B2 20130508; JP 5193054 B2 20130508; JP 5266447 B2 20130821; JP 5292545 B2 20130918; JP 5302686 B2 20131002; JP 5508371 B2 20140528; JP 5643262 B2 20141217; JP 5656811 B2 20150121; JP 5766133 B2 20150819; KR 101052952 B1 20110729; KR 101052997 B1 20110729; KR 101053279 B1 20110801; KR 101053299 B1 20110801; KR 101053348 B1 20110801; KR 101053389 B1 20110801; KR 101053403 B1 20110801; KR 101139113 B1 20120430; KR 101141863 B1 20120508; KR 101196026 B1 20121030; KR 101226381 B1 20130124; KR 101254894 B1 20130415; KR 20080078026 A 20080826; KR 20080078027 A 20080826; KR 20080078029 A 20080826; KR 20080078033 A 20080826; KR 20080078034 A 20080826; KR 20080078035 A 20080826; KR 20080080354 A 20080903; KR 20110003390 A 20110111; KR 20110003565 A 20110112; KR 20110003566 A 20110112; KR 20110007254 A 20110121; KR 20110008322 A 20110126; TW 200733166 A 20070901; TW 200735162 A 20070916; TW 200735163 A 20070916; TW 200737268 A 20071001; TW 200737269 A 20071001; TW 200739645 A 20071016; TW 200739663 A 20071016; TW 201503204 A 20150116; TW 201503205 A 20150116; TW 201503223 A 20150116; TW 201506986 A 20150216; TW I399779 B 20130621; TW I406318 B 20130821; TW I407475 B 20130901; TW I463514 B 20141201; TW I463515 B 20141201; TW I463524 B 20141201; TW I463525 B 20141201; TW I518737 B 20160121; TW I538004 B 20160611; TW I538005 B 20160611; TW I538009 B 20160611; WO 2007067310 A2 20070614; WO 2007067310 A3 20080313; WO 2007067311 A2 20070614; WO 2007067311 A3 20080313; WO 2007067313 A2 20070614; WO 2007067313 A3 20070907; WO 2007067314 A2 20070614; WO 2007067314 A3 20080306; WO 2007067315 A2 20070614; WO 2007067315 A3 20071206; WO 2007067316 A2 20070614; WO 2007067316 A3 20070913; WO 2007067317 A2 20070614; WO 2007067317 A3 20070816; WO 2007067318 A2 20070614; WO 2007067318 A3 20080717; WO 2007067328 A2 20070614; WO 2007067328 A3 20080228

DOCDB simple family (application)

US 2006043621 W 20061108; CN 201010151355 A 20061115; CN 201110202904 A 20061115; CN 201110273451 A 20061115; EP 06837663 A 20061115; EP 06837664 A 20061115; EP 06837698 A 20061115; EP 06837699 A 20061115; EP 06837732 A 20061115; EP 06837733 A 20061115; EP 06837734 A 20061115; EP 06837735 A 20061115; EP 06837944 A 20061115; EP 11182539 A 20061115; EP 11182566 A 20061115; EP 11183110 A 20061115; EP 11183114 A 20061115; JP 2008543311 A 20061115; JP 2008543312 A 20061115; JP 2008543313 A 20061115; JP 2008543314 A 20061115; JP 2008543315 A 20061115; JP 2008543316 A 20061115; JP 2008543317 A 20061115; JP 2008543318 A 20061115; JP 2008543325 A 20061115; JP 2011232869 A 20111024; JP 2011259420 A 20111128; JP 2011266313 A 20111205; JP 2012026734 A 20120209; JP 2012032193 A 20120216; JP 2012154808 A 20120710; KR 20087015920 A 20061115; KR 20087015923 A 20061115; KR 20087015965 A 20061115; KR 20087016065 A 20061115; KR 20087016066 A 20061115; KR 20087016067 A 20061115; KR 20087016082 A 20061115; KR 20107026969 A 20061115; KR 20107026970 A 20061115; KR 20107026971 A 20061115; KR 20107027876 A 20061115; KR 20107027892 A 20061115; TW 103131105 A 20061115; TW 103131106 A 20061115; TW 103131293 A 20061115; TW 103131500 A 20061115; TW 95142344 A 20061115; TW 95142345 A 20061115; TW 95142346 A 20061115; TW 95142347 A 20061115; TW 95142348 A 20061115; TW 95142349 A 20061115; TW 95142350 A 20061115; US 2006044338 W 20061115; US 2006044339 W 20061115; US 2006044388 W 20061115; US 2006044389 W 20061115; US 2006044439 W 20061115; US 2006044440 W 20061115; US 2006044441 W 20061115; US 2006044442 W 20061115; US 2006044729 W 20061115