EP 1955364 A1 20080813 - METHOD FOR PRODUCING A PLURALITY OF REGULARLY ARRANGED NANOCONNECTIONS ON A SUBSTRATE
Title (en)
METHOD FOR PRODUCING A PLURALITY OF REGULARLY ARRANGED NANOCONNECTIONS ON A SUBSTRATE
Title (de)
VERFAHREN ZUR ERZEUGUNG EINER MEHRZAHL REGELMÄSSIG ANGEORDNETER NANOVERBINDUNGEN AUF EINEM SUBSTRAT
Title (fr)
PROCEDE DE PRODUCTION D'UNE PLURALITE DE NANOCONNEXIONS DISPOSEES AVEC REGULARITE SUR UN SUBSTRAT
Publication
Application
Priority
- DE 2006002068 W 20061124
- DE 102005056879 A 20051128
Abstract (en)
[origin: DE102005056879A1] The method involves microstructuring a masking layer for producing a defined area with masking, and producing cracks in the masking layer. Material forming nano-connections are applied on structures of the masking layer and on non-masked regions of a substrate. The area is covered with a rectangular masking strip, where the length of the strip is larger than its breadth. A crack pattern comprising a set of crack lines is produced by inducing stress in the masking strip, such that the nano-connections are formed over the defined area.
IPC 8 full level
H01L 21/20 (2006.01); H01L 21/027 (2006.01); H01L 21/285 (2006.01)
CPC (source: EP US)
B82Y 10/00 (2013.01 - EP US); H01L 21/0272 (2013.01 - EP US)
Citation (search report)
See references of WO 2007059750A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102005056879 A1 20070531; EP 1955364 A1 20080813; US 2010112493 A1 20100506; WO 2007059750 A1 20070531
DOCDB simple family (application)
DE 102005056879 A 20051128; DE 2006002068 W 20061124; EP 06818095 A 20061124; US 8563706 A 20061124