EP 1959274 A1 20080820 - RADIATION DETECTING UNIT AND RADIATION INSPECTING APPARATUS
Title (en)
RADIATION DETECTING UNIT AND RADIATION INSPECTING APPARATUS
Title (de)
STRAHLUNGSDETEKTIONSEINHEIT UND STRAHLUNGSUNTERSUCHUNGSVORRICHTUNG
Title (fr)
UNITÉ DE DÉTECTION DE RADIATION ET APPAREIL D INSPECTION DE RADIATION
Publication
Application
Priority
- JP 2006324174 W 20061204
- JP 2005355134 A 20051208
Abstract (en)
Plural detection boards 22 are stacked and fixed. The detection board 22 has a wiring board 24, a semiconductor detection device 25 fixed on an upper surface of the wiring board 24 and configured to detect radiation, and a spacer 28 fixed on the upper surface of the wiring board 24. Each of the detection boards 22 is provided so that the semiconductor detection device 25 and the spacer 28 have a designated positional relationship. In addition, the spacers 28 are stacked and matched in an X-Y plane surface with each other so that the detection boards 22 are fixed by fixing members 23a and 23b. A step part 28e is provided in the spacer 28 so that the lower surface of the wiring board 24 does not come in contact with a lower side spacer 28. In upper and lower directions, the spacers 28 come in contact with each other so as to be positioned relative to each other.
IPC 8 full level
G01T 1/24 (2006.01)
CPC (source: EP KR US)
A61B 6/037 (2013.01 - KR); G01T 1/242 (2013.01 - EP US); G01T 1/249 (2013.01 - EP KR US); H01L 31/085 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1959274 A1 20080820; EP 1959274 A4 20161005; CN 101326449 A 20081217; JP 2007155667 A 20070621; JP 4885529 B2 20120229; KR 20080074957 A 20080813; US 2009242778 A1 20091001; US 8044361 B2 20111025; WO 2007066616 A1 20070614
DOCDB simple family (application)
EP 06833931 A 20061204; CN 200680045965 A 20061204; JP 2005355134 A 20051208; JP 2006324174 W 20061204; KR 20087013559 A 20080605; US 9604206 A 20061204