EP 1960307 A1 20080827 - MICRO-ELECTROMECHANICAL SYSTEM COMPRISING A DEFORMABLE PORTION AND A STRESS SENSOR
Title (en)
MICRO-ELECTROMECHANICAL SYSTEM COMPRISING A DEFORMABLE PORTION AND A STRESS SENSOR
Title (de)
MIKROELEKTROMECHANISCHES SYSTEM MIT EINEM VERFORMBAREN TEIL UND EINEM BELASTUNGSSENSOR
Title (fr)
SYSTEME MICRO-ELECTROMECANIQUE COMPRENANT UNE PARTIE DEFORMABLE ET UN DETECTEUR DE CONTRAINTE
Publication
Application
Priority
- FR 2006002713 W 20061212
- FR 0512740 A 20051215
Abstract (en)
[origin: FR2894953A1] The system has a stress detector (10) connected to a beam (1) and comprising a base portion (2) and shunt portion (3). The portions are juxtaposed such that the portion (2) is in electrical contact with the portion (3), where materials of the portions are selected such that contact resistance between the portions varies based on system`s deformation. The portion (3) has electrical conductivity greater than that of the portion (2). Electrical connections (4a-4d) are arranged such that the modification of distribution of current in the portions is detected from the connections. An independent claim is also included for a method of forming a micro-electromechanical system from a substrate.
IPC 8 full level
B81B 3/00 (2006.01)
IPC 8 main group level
G01Q 60/00 (2010.01)
CPC (source: EP US)
B82Y 35/00 (2013.01 - US); G01L 1/2293 (2013.01 - EP US); G01L 9/0052 (2013.01 - EP US); G01P 15/12 (2013.01 - EP US); G01Q 20/04 (2013.01 - EP US); G01Q 60/38 (2013.01 - EP US); G01P 2015/0828 (2013.01 - EP US)
Citation (search report)
See references of WO 2007080259A1
Citation (examination)
BHUSHAN: "Nanotechnology", 1 January 2004, SPRINGER, Heidelberg, Allemagne, ISBN: 3540012184, article "Piezoresistive Detection", pages: 355 - 356
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2894953 A1 20070622; FR 2894953 B1 20080307; EP 1960307 A1 20080827; JP 2009519454 A 20090514; US 2009301176 A1 20091210; WO 2007080259 A1 20070719
DOCDB simple family (application)
FR 0512740 A 20051215; EP 06841917 A 20061212; FR 2006002713 W 20061212; JP 2008545040 A 20061212; US 9631406 A 20061212