EP 1964151 A1 20080903 - METHOD AND APPARATUS FOR PRODUCING A MAGNETIC-FIELD SYSTEM
Title (en)
METHOD AND APPARATUS FOR PRODUCING A MAGNETIC-FIELD SYSTEM
Title (de)
VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN EINES MAGNETFELDSYSTEMS
Title (fr)
PROCÉDÉ ET DISPOSITIF DE GÉNÉRATION D UN SYSTÈME DE CHAMPS MAGNÉTIQUES
Publication
Application
Priority
- DE 2006002224 W 20061213
- DE 102005061255 A 20051220
- DE 102006002021 A 20060113
- DE 102006021565 A 20060508
Abstract (en)
[origin: DE102006021565A1] A process for producing a magnetic field system for a cathode unit, which has one or more cluster magnetron cathodes with a number of segments, comprises using a number of permanent magnets and electromagnets. The latter are switched in step and/or the strength and/or direction of the electromagnet generated field is altered.
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: EP)
H01J 37/3405 (2013.01); H01J 37/3408 (2013.01); H01J 37/3458 (2013.01); H01J 37/3467 (2013.01)
Citation (search report)
See references of WO 2007076793A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006021565 A1 20070628; EP 1964151 A1 20080903; WO 2007076793 A1 20070712
DOCDB simple family (application)
DE 102006021565 A 20060508; DE 2006002224 W 20061213; EP 06828661 A 20061213