EP 1966078 A1 20080910 - METHOD FOR SEALING AN OPENING
Title (en)
METHOD FOR SEALING AN OPENING
Title (de)
VERFAHREN ZUM VERSCHLIEßEN EINER ÖFFNUNG
Title (fr)
PROCÉDÉ POUR FERMER UNE OUVERTURE
Publication
Application
Priority
- EP 2006068869 W 20061124
- DE 102005060870 A 20051220
Abstract (en)
[origin: WO2007071523A1] The invention relates to an integrated component with a substrate (1), wherein the substrate (1) has a cavity (10) enclosing a mechanical structure (11). The cavity (10) is filled with a fluid (14) of a given composition at a given pressure and the mechanical properties of the mechanical structure (11) are altered by the fluid (14).
IPC 8 full level
B81C 99/00 (2010.01)
CPC (source: EP US)
B81C 1/00293 (2013.01 - EP US); B81C 2203/0145 (2013.01 - EP US)
Citation (search report)
See references of WO 2007071523A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 102005060870 A1 20070621; EP 1966078 A1 20080910; JP 2009520371 A 20090521; US 2009174148 A1 20090709; US 8304845 B2 20121106; WO 2007071523 A1 20070628
DOCDB simple family (application)
DE 102005060870 A 20051220; EP 06830110 A 20061124; EP 2006068869 W 20061124; JP 2008546328 A 20061124; US 8689306 A 20061124