Global Patent Index - EP 1966886 A2

EP 1966886 A2 20080910 - A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR

Title (en)

A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR

Title (de)

MEMS-RESONATOR, HERSTELLUNGSVERFAHREN DAFÜR UND MEMS-OSZILLATOR

Title (fr)

RESONATEUR MEMS, PROCEDE DE REALISATION, ET OSCILLATEUR MEMS

Publication

EP 1966886 A2 20080910 (EN)

Application

EP 06842591 A 20061218

Priority

  • IB 2006054930 W 20061218
  • EP 05112943 A 20051223
  • EP 06842591 A 20061218

Abstract (en)

[origin: WO2007072408A2] The invention relates to a MEMS resonator comprising a first electrode, a movable element (48) comprising a second electrode, the movable element (48) at least being movable towards the first electrode, the first electrode and the movable element (48) being separated by a gap (46, 47) having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap (46, 47) has been provided with a dielectric layer (60) on at least one of the sidewalls.

IPC 8 full level

H03H 9/02 (2006.01); H03H 3/007 (2006.01)

CPC (source: EP)

H03H 3/0072 (2013.01); H03H 9/02244 (2013.01); H03H 2009/02496 (2013.01)

Citation (search report)

See references of WO 2007072408A2

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 2007072408 A2 20070628; WO 2007072408 A3 20070927; CN 101395795 A 20090325; CN 101395795 B 20110629; EP 1966886 A2 20080910; JP 2009521175 A 20090528

DOCDB simple family (application)

IB 2006054930 W 20061218; CN 200680048256 A 20061218; EP 06842591 A 20061218; JP 2008546789 A 20061218