EP 1967608 A1 20080910 - High density ceramic and cermet sputtering targets by microwave sintering
Title (en)
High density ceramic and cermet sputtering targets by microwave sintering
Title (de)
Hochdichte Keramik und Cermet-Sputter-Targets durch Mikrowellensinterung
Title (fr)
Céramique haute densité et cibles de pulvérisation de cermet par frittage par micro-ondes
Publication
Application
Priority
- US 90418507 P 20070301
- US 95024007 A 20071204
Abstract (en)
A method of manufacturing sputtering targets from powder materials, comprising steps of: providing at least one raw powder material; forming the at least one raw powder material into a green body with density greater than about 40 % of theoretical maximum density; treating the green body with microwaves to form a sintered body with density greater than about 97 % of theoretical maximum density; and forming a sputtering target from the sintered body. The methodology is especially useful in the fabrication of targets comprising dielectric and cermet materials.
IPC 8 full level
C23C 14/34 (2006.01)
CPC (source: EP KR US)
B22F 3/105 (2013.01 - EP US); C04B 35/03 (2013.01 - KR); C04B 35/053 (2013.01 - EP US); C04B 35/10 (2013.01 - KR); C04B 35/111 (2013.01 - EP US); C04B 35/44 (2013.01 - EP US); C04B 35/46 (2013.01 - EP KR US); C04B 35/465 (2013.01 - EP US); C04B 35/481 (2013.01 - EP US); C04B 35/486 (2013.01 - EP US); C04B 35/491 (2013.01 - EP US); C04B 35/495 (2013.01 - EP US); C04B 35/5607 (2013.01 - EP US); C04B 35/583 (2013.01 - EP US); C04B 35/632 (2013.01 - EP US); C22C 1/051 (2013.01 - EP US); C22C 29/005 (2013.01 - EP US); C23C 14/3414 (2013.01 - EP US); B22F 2003/1054 (2013.01 - EP US); B22F 2998/10 (2013.01 - EP US); C04B 2111/90 (2013.01 - KR); C04B 2235/604 (2013.01 - EP US); C04B 2235/608 (2013.01 - EP US); C04B 2235/6562 (2013.01 - EP US); C04B 2235/6567 (2013.01 - EP US); C04B 2235/667 (2013.01 - EP US); C04B 2235/77 (2013.01 - EP US)
Citation (search report)
- [X] JP 2000169956 A 20000620 - JAPAN ENERGY CORP
- [Y] JP 2004284877 A 20041014 - JAPAN SCIENCE & TECH AGENCY
- [Y] US 6293986 B1 20010925 - ROEDIGER KLAUS [DE], et al
- [Y] JP 2006176808 A 20060706 - MITSUBISHI MATERIALS CORP
- [Y] US 4880578 A 19891114 - HOLCOMBE CRESSIE E [US], et al
- [XY] DATABASE WPI Week 200779, Derwent World Patents Index; AN 2007-855968, XP002483758
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
EP 1967608 A1 20080910; KR 20080080462 A 20080904; SG 145671 A1 20080929; US 2008210555 A1 20080904
DOCDB simple family (application)
EP 08102036 A 20080226; KR 20080019547 A 20080303; SG 2008015935 A 20080226; US 95024007 A 20071204