EP 1974369 A4 20101124 - A METHOD OF MICROMINIATURIZING A NANO-STRUCTURE
Title (en)
A METHOD OF MICROMINIATURIZING A NANO-STRUCTURE
Title (de)
VERFAHREN ZUR MIKROMINIATURISIERUNG EINER NANOSTRUKTUR
Title (fr)
PROCEDE DE MICROMINIATURISATION D'UNE NANOSTRUCTURE
Publication
Application
Priority
- US 2006049394 W 20061228
- US 75461405 P 20051230
- US 64552606 A 20061227
Abstract (en)
[origin: US2007161238A1] The present invention provides a "microminiaturizing method of nano-structure" with fabricating process steps as follows: First deposit the material of molecule or atom state on the top-opening of the nano cylindrical pore, which having formed on the substrate, so that the diameter of said top-opening gradually reduce to become a reduced nano-aperture, whose opening diameter is smaller than that of said top-opening; Then, directly pass the deposit material of gas molecule or atom state through said reduced nano-aperture; thereby a nano-structure of nano quantum dot, nano rod or nano ring with smaller nano scale is directly formed on the surface of said substrate, which being laid beneath the bottom of said nano cylindrical pore.
IPC 8 full level
H01L 21/335 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); H01L 47/00 (2006.01)
CPC (source: EP KR US)
B81C 99/0085 (2013.01 - EP US); B82B 1/00 (2013.01 - KR); B82B 3/00 (2013.01 - KR); B82Y 10/00 (2013.01 - EP US); B82Y 15/00 (2013.01 - EP US); B82Y 30/00 (2013.01 - EP US); H01L 21/44 (2013.01 - KR); H01L 21/76838 (2013.01 - EP US); H01L 29/127 (2013.01 - EP US); H01L 29/66439 (2013.01 - EP US); B82Y 40/00 (2013.01 - KR)
Citation (search report)
- [XY] WO 0219036 A1 20020307 - UNISEARCH LTD [AU], et al
- [Y] US 2004127012 A1 20040701 - JIN SUNGHO [US]
- [Y] US 2005241933 A1 20051103 - BRANTON DANIEL [US], et al
- [Y] US 5420067 A 19950530 - HSU DAVID S Y [US]
- [A] EP 0703626 A2 19960327 - TEXAS INSTRUMENTS INC [US]
- [A] US 4599790 A 19860715 - KIM BUMMAN [US], et al
- See references of WO 2008002326A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2007161238 A1 20070712; US 8318520 B2 20121127; CN 101390193 A 20090318; CN 101390193 B 20110316; EP 1974369 A2 20081001; EP 1974369 A4 20101124; JP 2009522785 A 20090611; JP 5372520 B2 20131218; KR 20080083692 A 20080918; WO 2008002326 A2 20080103; WO 2008002326 A3 20080515
DOCDB simple family (application)
US 64552606 A 20061227; CN 200680050064 A 20061228; EP 06851505 A 20061228; JP 2008548713 A 20061228; KR 20087018766 A 20080730; US 2006049394 W 20061228