EP 1979875 A2 20081015 - METHOD AND SYSTEM FOR THE OPTICAL INSPECTION OF A PERIODIC STRUCTURE
Title (en)
METHOD AND SYSTEM FOR THE OPTICAL INSPECTION OF A PERIODIC STRUCTURE
Title (de)
VERFAHREN UND SYSTEM ZUR OPTISCHEN INSPEKTION EINER PERIODISCHEN STRUKTUR
Title (fr)
PROCEDE ET SYSTEME DESTINES A L'INSPECTION OPTIQUE D'UNE STRUCTURE PERIODIQUE
Publication
Application
Priority
- EP 2006012233 W 20061219
- DE 102006000946 A 20060107
Abstract (en)
[origin: US2009129682A1] Disclosed are a method and a system for inspecting a periodic structure (1) by means of an optical image recorder which is provided with a pixel structure (2) and whose recorded image (6) is compared to a faultless reference image (4) of the periodic structure (1). In order to be able to reliably detect faults with simple means, the phase angle (phase X, phase Y) of the periodic structure (1) relative to the pixel structure (2) of the optical image recorder is determined in at least one position (X, Y) of the reference image (4). The recorded image (6) is subdivided into inspection areas (7), and the phase angle (phase X, phase Y) of the periodic structure (1) relative to the pixel structure (2) of the image recorder is determined for each inspection area (7). In order to compare an inspection area (7) to the reference image (4), a reference image area (8) is then selected whose phase angle (phase X, phase Y) corresponds to the inspection area (7).
IPC 8 full level
G06T 7/00 (2006.01)
CPC (source: EP KR US)
G01N 21/95607 (2013.01 - EP US); G06T 7/00 (2013.01 - KR); G06T 7/0002 (2013.01 - EP US); G06T 7/0004 (2013.01 - EP US); G06T 7/001 (2013.01 - EP US); G06T 7/40 (2013.01 - KR); G06V 10/435 (2022.01 - EP US); G01N 2021/9513 (2013.01 - EP US); G06T 2207/30121 (2013.01 - EP US)
Citation (search report)
See references of WO 2007079934A2
Citation (examination)
US 4805123 A 19890214 - SPECHT DONALD F [US], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
US 2009129682 A1 20090521; CN 101405766 A 20090408; CN 101405766 B 20110817; DE 102006000946 A1 20070712; DE 102006000946 B4 20071115; EP 1979875 A2 20081015; IL 192020 A0 20081229; IL 192020 A 20150531; JP 2009522561 A 20090611; KR 101031618 B1 20110427; KR 20080100341 A 20081117; TW 200732655 A 20070901; TW I403718 B 20130801; WO 2007079934 A2 20070719; WO 2007079934 A3 20081002
DOCDB simple family (application)
US 16001606 A 20061219; CN 200680050442 A 20061219; DE 102006000946 A 20060107; EP 06841039 A 20061219; EP 2006012233 W 20061219; IL 19202008 A 20080605; JP 2008548942 A 20061219; KR 20087019382 A 20061219; TW 95148724 A 20061225