EP 1994446 A1 20081126 - SLM LITHOGRAPHY: PRINTING TO BELOW K1=.30 WITHOUT PREVIOUS OPC PROCESSING
Title (en)
SLM LITHOGRAPHY: PRINTING TO BELOW K1=.30 WITHOUT PREVIOUS OPC PROCESSING
Title (de)
SLM-LITHOGRAPHIE: DRUCK UNTER K1=0,30 OHNE VORHERIGE OPC-VERARBEITUNG
Title (fr)
LITHOGRAPHIE PAR MODULATEUR SPATIAL DE LUMIÈRE: IMPRESSION EN DESSOUS DE K1 = 30 SANS TRAITEMENT PAR CORRECTION DE PROXIMITE OPTIQUE PREALABLE
Publication
Application
Priority
- EP 2007001638 W 20070226
- US 77627506 P 20060224
Abstract (en)
[origin: WO2007096195A1] Previously disclosed methods and devices are extended in this application by two-dimensional analysis of optical proximity interactions and by fashioning a computationally efficient kernel for rapid calculation of adjustments to be made. The computations can be made in realtime, whereby the use of OPC assist features can be reduced, with substantial savings in file size and computational requirements.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR)
G03F 7/70125 (2013.01 - EP KR); G03F 7/70283 (2013.01 - EP KR); G03F 7/70291 (2013.01 - EP KR); G03F 7/70308 (2013.01 - EP KR); G03F 7/704 (2013.01 - KR); G03F 7/70441 (2013.01 - EP KR); G03F 7/70508 (2013.01 - EP KR); G03F 7/70566 (2013.01 - EP KR)
Citation (search report)
See references of WO 2007096195A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007096195 A1 20070830; EP 1994446 A1 20081126; JP 2009527911 A 20090730; KR 20080106293 A 20081204
DOCDB simple family (application)
EP 2007001638 W 20070226; EP 07703561 A 20070226; JP 2008555711 A 20070226; KR 20087023348 A 20080924