EP 1994807 B1 20090422 - APPARATUS FOR PRODUCING A PLASMA JET
Title (en)
APPARATUS FOR PRODUCING A PLASMA JET
Title (de)
VORRICHTUNG ZUR ERZEUGUNG EINES PLASMA-JETS
Title (fr)
DISPOSITIF DE PRODUCTION D'UN JET DE PLASMA
Publication
Application
Priority
- EP 2007001386 W 20070217
- DE 102006012100 A 20060316
Abstract (en)
[origin: US2009155137A1] The invention relates to an apparatus for producing a plasma jet, having at least one discharge tube through which a process gas flows. According to the invention, electrically conductive discharge protection is provided on at least one discharge tube. The advantages of the invention are, in particular, that parasitic discharges are suppressed, and the thermal loads on the individual components of the apparatus and of the substrate are reduced.
IPC 8 full level
H05H 1/24 (2006.01)
CPC (source: EP KR US)
H05H 1/2406 (2013.01 - EP US); H05H 1/245 (2021.05 - EP KR); H05H 1/246 (2021.05 - EP KR); H05H 1/245 (2021.05 - US); H05H 1/246 (2021.05 - US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
US 2009155137 A1 20090618; AT E429799 T1 20090515; CN 101326863 A 20081217; DE 102006012100 B3 20070920; DE 502007000650 D1 20090604; EP 1994807 A1 20081126; EP 1994807 B1 20090422; JP 2009529772 A 20090820; KR 20080104225 A 20081202; WO 2007104404 A1 20070920
DOCDB simple family (application)
US 29329607 A 20070217; AT 07711569 T 20070217; CN 200780000574 A 20070217; DE 102006012100 A 20060316; DE 502007000650 T 20070217; EP 07711569 A 20070217; EP 2007001386 W 20070217; JP 2008558664 A 20070217; KR 20077028418 A 20071205