EP 1999498 A1 20081210 - BROADBAND ANTIREFLECTIVE OPTICAL COMPONENTS WITH CURVED SURFACES AND THEIR PRODUCTION
Title (en)
BROADBAND ANTIREFLECTIVE OPTICAL COMPONENTS WITH CURVED SURFACES AND THEIR PRODUCTION
Title (de)
BREITBANDING ENTSPIEGELTE OPTISCHE BAUTEILE MIT GEKRUEMMTEN OBERFLAECHEN UND DEREN HERSTELLUNG
Title (fr)
COMPOSANTS OPTIQUES ANTIREFLETS À LARGE BANDE AVEC SURFACES INCURVÉES ET LEUR PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- EP 2007052818 W 20070323
- DE 102006013670 A 20060324
Abstract (en)
[origin: DE102006013670A1] The component has a surface for wide band anti reflection coating consisting of needle-like structures with nanometer dimensions with a larger aspect ratio of 4 :1. The surface is developed by reactive ion etching process (RIE) of silicon surfaces under application of processing gas such as oxygen and sulfur hexafluoride. The surface of a side or the surfaces of both sides of the component is non-reflective, where the needle-like structures consist of silicon coated with silicon dioxide.
IPC 8 full level
G02B 1/11 (2006.01); G02B 5/18 (2006.01); H01L 31/0236 (2006.01)
CPC (source: EP US)
G02B 1/11 (2013.01 - EP US); G02B 1/118 (2013.01 - EP US)
Citation (search report)
See references of WO 2007110392A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006013670 A1 20070927; EP 1999498 A1 20081210; US 2009180188 A1 20090716; WO 2007110392 A1 20071004
DOCDB simple family (application)
DE 102006013670 A 20060324; EP 07727292 A 20070323; EP 2007052818 W 20070323; US 29412907 A 20070323