EP 2002301 A1 20081217 - REFLECTING OPTICAL ELEMENT WITH ECCENTRIC OPTICAL PASSAGEWAY
Title (en)
REFLECTING OPTICAL ELEMENT WITH ECCENTRIC OPTICAL PASSAGEWAY
Title (de)
REFLEKTIERENDES OPTISCHES ELEMENT MIT EXZENTRISCHEM OPTISCHEM DURCHGANG
Title (fr)
ELEMENT OPTIQUE REFLECHISSANT AVEC PASSAGE OPTIQUE EXCENTRE
Publication
Application
Priority
- EP 2007002951 W 20070402
- US 39571906 A 20060331
Abstract (en)
[origin: WO2007112997A1] There is provided an optical element comprising an optical element body (107.1, 108.1), a reflecting area (107.4, 108.4) and an optical passageway (107.6, 108.6). The optical element body defines an axis of rotational symmetry (107.3, 108.3). The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
IPC 8 full level
G02B 17/08 (2006.01); G02B 7/182 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP)
G02B 17/0812 (2013.01); G03F 7/70225 (2013.01); G03F 7/70825 (2013.01)
Citation (search report)
See references of WO 2007112997A1
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
DOCDB simple family (application)
EP 2007002951 W 20070402; EP 07723892 A 20070402