EP 2007566 A4 20101013 - CHUCKING SYSTEM COMPRISING AN ARRAY OF FLUID CHAMBERS
Title (en)
CHUCKING SYSTEM COMPRISING AN ARRAY OF FLUID CHAMBERS
Title (de)
AUFSPANNSYSTEM MIT EINER ANORDNUNG AUS DRUCKKÄSTEN
Title (fr)
SYSTÈME DE MANDRIN COMPRENANT UN RÉSEAU DE CHAMBRES À FLUIDE
Publication
Application
Priority
- US 2007007487 W 20070326
- US 78877706 P 20060403
Abstract (en)
[origin: WO2007126767A2] The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with said first support region cincturing said second support region and said first and second recesses, and said second support region cincturing said second recess, with said substrate resting against said first and second support regions, with said first recess and a portion of said substrate in superimposition therewith defining a first chamber and said second recess and a portion of said substrate in superimposition therewith defining a second chamber, with each column of said first chambers and each row of said second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in said array of fluid chambers.
IPC 8 full level
H01L 21/683 (2006.01)
CPC (source: EP KR)
B29C 59/022 (2013.01 - KR); B82Y 10/00 (2013.01 - EP KR); B82Y 40/00 (2013.01 - EP KR); G03F 7/0002 (2013.01 - EP KR); G03F 7/707 (2013.01 - KR); H01L 21/6715 (2013.01 - EP KR); H01L 21/6838 (2013.01 - EP KR)
Citation (search report)
- [X] WO 2004044651 A1 20040527 - MOLECULAR IMPRINTS INC [US]
- [X] JP 2000195927 A 20000714 - SONY CORP
- [X] US 6809802 B1 20041026 - TSUKAMOTO IZUMI [JP], et al
- [A] US 5534073 A 19960709 - KINOSHITA YOSHIMI [JP], et al
- See references of WO 2007126767A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2007126767 A2 20071108; WO 2007126767 A3 20080731; CN 101415535 A 20090422; EP 2007566 A2 20081231; EP 2007566 A4 20101013; JP 2009532899 A 20090910; JP 2011077529 A 20110414; JP 4667524 B2 20110413; KR 20090004910 A 20090112; TW 200813619 A 20080316; TW I352874 B 20111121
DOCDB simple family (application)
US 2007007487 W 20070326; CN 200780012009 A 20070326; EP 07754062 A 20070326; JP 2009504203 A 20070326; JP 2010248309 A 20101105; KR 20087024314 A 20081002; TW 96111034 A 20070329