EP 2010355 A1 20090107 - APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES
Title (en)
APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES
Title (de)
VORRICHTUNG ZUM LASERAUSGLÜHEN GROSSER SUBSTRATE UND VERFAHREN ZUM LASERAUSGLÜHEN GROSSER SUBSTRATE
Title (fr)
APPAREIL ET PROCÉDÉ DE RECUIT AU LASER DE GRANDS SUBSTRATS
Publication
Application
Priority
- EP 2007053030 W 20070329
- US 74533306 P 20060421
Abstract (en)
[origin: WO2007122061A1] The invention relates to an apparatus for laser annealing of large substrates comprising an optical device for generating a narrow illuminating line (31) on an illumination plane (36) of said substrate (32), said illumination line (31) being generated from a laser beam and having a cross-section with an expansion in a first direction and an expansion in a second direction, whereby said expansion in said first direction exceeds said expansion in said second direction by a multiple, and a scanning device being constructed for scanning a first section of said illumination plane of said substrate with said illuminating line in said second direction. According to the invention the apparatus comprises a rotating device for rotating (39) said substrate (32) relative to said illuminating line (31) by 180° about an axis (38) of rotation being normal to said illumination plane (36) after scanning said first section (37), whereby said scanning device is constructed for scanning a second section of said illumination plane (36) of said substrate (32) being adjacent to said first section of said illumination plane (36) of said substrate (32) with said illuminating line (31) in said second direction (y).
IPC 8 full level
B23K 26/06 (2006.01); B23K 26/073 (2006.01); B23K 26/08 (2006.01); G02B 27/09 (2006.01); H01L 21/20 (2006.01)
CPC (source: EP KR US)
B23K 26/0604 (2013.01 - EP KR); B23K 26/0648 (2013.01 - EP KR); B23K 26/0652 (2013.01 - EP KR); B23K 26/066 (2015.10 - EP KR); B23K 26/0738 (2013.01 - EP KR); B23K 26/0823 (2013.01 - EP KR); B23K 26/083 (2013.01 - EP KR); G02B 27/09 (2013.01 - EP KR US); H01L 21/02422 (2013.01 - KR); H01L 21/02532 (2013.01 - KR); H01L 21/02678 (2013.01 - KR); H01L 21/02686 (2013.01 - KR); H01L 21/02691 (2013.01 - KR); H01L 27/1285 (2013.01 - KR); H01L 21/02422 (2013.01 - EP); H01L 21/02532 (2013.01 - EP); H01L 21/02678 (2013.01 - EP); H01L 21/02686 (2013.01 - EP); H01L 21/02691 (2013.01 - EP US); H01L 27/1285 (2013.01 - EP)
Designated contracting state (EPC)
DE
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007122061 A1 20071101; EP 2010355 A1 20090107; JP 2009534820 A 20090924; KR 20080113077 A 20081226; KR 20080113121 A 20081226; TW 200741883 A 20071101
DOCDB simple family (application)
EP 2007053030 W 20070329; EP 07727502 A 20070329; JP 2009505824 A 20070329; KR 20087025572 A 20081020; KR 20087028606 A 20081121; TW 96109812 A 20070321