EP 2016624 A1 20090121 - SEMICONDUCTOR DEVICE INCLUDING A FLOATING GATE MEMORY CELL WITH A SUPERLATTICE CHANNEL AND ASSOCIATED METHODS
Title (en)
SEMICONDUCTOR DEVICE INCLUDING A FLOATING GATE MEMORY CELL WITH A SUPERLATTICE CHANNEL AND ASSOCIATED METHODS
Title (de)
HALBLEITERBAUELEMENT MIT FLOATING-GATE-SPEICHERZELLE MIT EINEM ÜBERGITTERKANAL UND ENTSPRECHENDE VERFAHREN
Title (fr)
DISPOSITIF A SEMI-CONDUCTEUR COMPORTANT UNE CELLULE DE MEMOIRE A GRILLE FLOTTANTE AVEC UN CANAL DE SUPER-RESEAU ET PROCEDES ASSOCIES
Publication
Application
Priority
- US 2007068155 W 20070503
- US 38178706 A 20060505
- US 38179406 A 20060505
Abstract (en)
[origin: WO2007131117A1] A semiconductor device may include a semiconductor substrate (21) and at least one non- volatile memory cell. The at least one memory cell may include spaced apart source and drain regions (26,27), and a superlattice channel (25) including a plurality of stacked groups of layers on the semiconductor substrate between the source and drain regions. Each group of layers of the superlattice channel may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon, which may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. A floating gate (37) may be adjacent the superlattice channel, and a control gate (39) may be adjacent the second gate (38) insulating layer.
IPC 8 full level
H01L 29/788 (2006.01); H01L 27/115 (2006.01); H01L 29/15 (2006.01)
CPC (source: EP)
H01L 29/155 (2013.01); H01L 29/42324 (2013.01); H01L 29/66825 (2013.01); H01L 29/7881 (2013.01)
Citation (search report)
See references of WO 2007131117A1
Designated contracting state (EPC)
DE FR GB IT
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007131117 A1 20071115; AU 2007247953 A1 20071115; CA 2650809 A1 20071115; EP 2016624 A1 20090121; JP 2009536463 A 20091008; TW 200807699 A 20080201; TW I335664 B 20110101
DOCDB simple family (application)
US 2007068155 W 20070503; AU 2007247953 A 20070503; CA 2650809 A 20070503; EP 07761833 A 20070503; JP 2009510077 A 20070503; TW 96115983 A 20070504