EP 2020672 A3 20101110 - High frequency generator for ion and electron sources
Title (en)
High frequency generator for ion and electron sources
Title (de)
Hochfrequenzgenerator für Ionen- und Elektronenquellen
Title (fr)
Générateur haute fréquence pour sources d'ions et d'électrons
Publication
Application
Priority
DE 102007036592 A 20070802
Abstract (en)
[origin: EP2020672A2] The device has a coupling coil (5) that supplies high frequency energy for performing plasma excitation. A coupling capacitor (22) is electrically coupled with the coil. A high frequency generator (16) i.e. radio frequency generator, is electrically coupled with the coil. The generator with the capacitor forms a resonant circuit e.g. series resonant circuit. The generator has a phase locked loop control device that automatically performs impedance matching of the circuit, so that the circuit is operated by using resonance frequency.
IPC 8 full level
H01J 27/16 (2006.01); F03H 1/00 (2006.01)
CPC (source: EP US)
F03H 1/0018 (2013.01 - EP US); H01J 27/16 (2013.01 - EP US)
Citation (search report)
- [XI] DE 19948229 C1 20010503 - DAIMLER CHRYSLER AG [DE]
- [XI] US 2007114945 A1 20070524 - MATTABONI PAUL J [US], et al
- [A] US 2003215373 A1 20031120 - REYZELMAN LEONID E [US], et al
- [A] US 4507588 A 19850326 - ASMUSSEN JES [US], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
EP 2020672 A2 20090204; EP 2020672 A3 20101110; EP 2020672 B1 20200506; DE 102007036592 A1 20090219; DE 102007036592 B4 20140710; RU 2008131500 A 20100210; RU 2461908 C2 20120920; US 2009058303 A1 20090305; US 8294370 B2 20121023
DOCDB simple family (application)
EP 08013495 A 20080726; DE 102007036592 A 20070802; RU 2008131500 A 20080731; US 18264508 A 20080730