EP 2020672 B1 20200506 - High frequency generator for ion and electron sources
Title (en)
High frequency generator for ion and electron sources
Title (de)
Hochfrequenzgenerator für Ionen- und Elektronenquellen
Title (fr)
Générateur haute fréquence pour sources d'ions et d'électrons
Publication
Application
Priority
DE 102007036592 A 20070802
Abstract (en)
[origin: EP2020672A2] The device has a coupling coil (5) that supplies high frequency energy for performing plasma excitation. A coupling capacitor (22) is electrically coupled with the coil. A high frequency generator (16) i.e. radio frequency generator, is electrically coupled with the coil. The generator with the capacitor forms a resonant circuit e.g. series resonant circuit. The generator has a phase locked loop control device that automatically performs impedance matching of the circuit, so that the circuit is operated by using resonance frequency.
IPC 8 full level
H01J 27/16 (2006.01); F03H 1/00 (2006.01)
CPC (source: EP US)
F03H 1/0018 (2013.01 - EP US); H01J 27/16 (2013.01 - EP US)
Citation (examination)
PAUL HOROWITZ, WINFRIED HILL: "The Art of Electronics, Second Edition", 1989, CAMBRIDGE UNIVERSITY PRESS, Cambridge, UK, ISBN: 0-521-37095-7, pages: 644 - 646
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 2020672 A2 20090204; EP 2020672 A3 20101110; EP 2020672 B1 20200506; DE 102007036592 A1 20090219; DE 102007036592 B4 20140710; RU 2008131500 A 20100210; RU 2461908 C2 20120920; US 2009058303 A1 20090305; US 8294370 B2 20121023
DOCDB simple family (application)
EP 08013495 A 20080726; DE 102007036592 A 20070802; RU 2008131500 A 20080731; US 18264508 A 20080730