Global Patent Index - EP 2021525 A2

EP 2021525 A2 2009-02-11 - GAS MANIFOLDS FOR USE DURING EPITAXIAL FILM FORMATION

Title (en)

GAS MANIFOLDS FOR USE DURING EPITAXIAL FILM FORMATION

Title (de)

GASVERTEILER ZUR VERWENDUNG BEI DER EPITAXIALFILMBILDUNG

Title (fr)

COLLECTEURS DE GAZ S'UTILISANT PENDANT LA FORMATION D'UN FILM ÉPITAXIAL

Publication

EP 2021525 A2 (EN)

Application

EP 07754972 A

Priority

  • US 2007008541 W
  • US 79022706 P

Abstract (en)

[origin: WO2007117576A2] The present invention provides methods, systems, and apparatus for epitaxial film formation that includes an epitaxial chamber adapted to form an epitaxial layer on a substrate; a deposition gas manifold adapted to supply at least one deposition gas and a carrier gas to the epitaxial chamber; and an etchant gas manifold, separate from the deposition gas manifold, and adapted to supply at least one etchant gas and a carrier gas to the epitaxial chamber. Numerous other aspects are disclosed.

IPC 8 full level (invention and additional information)

C23C 16/00 (2006.01); C23C 16/455 (2006.01)

CPC (invention and additional information)

C30B 35/00 (2013.01); C30B 23/02 (2013.01); C30B 25/02 (2013.01); C30B 33/12 (2013.01)

Citation (search report)

See references of WO 2007117576A3

Designated contracting state (EPC)

DE FR NL

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

WO 2007117576 A2 20071018; WO 2007117576 A3 20081016; CN 101415859 A 20090422; EP 2021525 A2 20090211; JP 2009533843 A 20090917; KR 20090006144 A 20090114; TW 200805456 A 20080116

INPADOC legal status


2011-01-12 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20101101

2009-11-11 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): DE FR NL

2009-03-25 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: ISHIKAWA, DAVID

2009-03-25 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: METZNER, CRAIG, R.

2009-03-25 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: ZOJAJI, ALI

2009-03-25 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: KIM, YIHWAN

2009-03-25 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SAMOILOV, ARKADII, V.

2009-02-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20081106

2009-02-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-11 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL BA HR MK RS