EP 2021525 A2 20090211 - GAS MANIFOLDS FOR USE DURING EPITAXIAL FILM FORMATION
Title (en)
GAS MANIFOLDS FOR USE DURING EPITAXIAL FILM FORMATION
Title (de)
GASVERTEILER ZUR VERWENDUNG BEI DER EPITAXIALFILMBILDUNG
Title (fr)
COLLECTEURS DE GAZ S'UTILISANT PENDANT LA FORMATION D'UN FILM ÉPITAXIAL
Publication
Application
Priority
- US 2007008541 W 20070406
- US 79022706 P 20060407
Abstract (en)
[origin: WO2007117576A2] The present invention provides methods, systems, and apparatus for epitaxial film formation that includes an epitaxial chamber adapted to form an epitaxial layer on a substrate; a deposition gas manifold adapted to supply at least one deposition gas and a carrier gas to the epitaxial chamber; and an etchant gas manifold, separate from the deposition gas manifold, and adapted to supply at least one etchant gas and a carrier gas to the epitaxial chamber. Numerous other aspects are disclosed.
IPC 8 full level
C23C 16/00 (2006.01); C23C 16/455 (2006.01)
CPC (source: EP KR)
C23C 16/42 (2013.01 - KR); C30B 23/02 (2013.01 - EP KR); C30B 25/02 (2013.01 - EP); C30B 33/12 (2013.01 - EP); C30B 35/00 (2013.01 - EP); H01L 21/02 (2013.01 - KR); H01L 21/20 (2013.01 - KR)
Citation (search report)
See references of WO 2007117576A2
Designated contracting state (EPC)
DE FR NL
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007117576 A2 20071018; WO 2007117576 A3 20081016; CN 101415859 A 20090422; EP 2021525 A2 20090211; JP 2009533843 A 20090917; KR 20090006144 A 20090114; TW 200805456 A 20080116
DOCDB simple family (application)
US 2007008541 W 20070406; CN 200780012516 A 20070406; EP 07754972 A 20070406; JP 2009504307 A 20070406; KR 20087026634 A 20081030; TW 96112380 A 20070409