EP 2021756 A1 20090211 - MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
Title (en)
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
Title (de)
MEMS VAKUUMSENSOR NACH DEM REIBUNGSPRINZIP
Title (fr)
CAPTEUR MEMS DANS LE VIDE SELON LE PRINCIPE DE FRICTION
Publication
Application
Priority
- EP 2007004078 W 20070509
- DE 102006024381 A 20060524
Abstract (en)
[origin: WO2007134714A1] The invention relates to a pressure-measuring sensor element having a substrate (5) and at least one mass element (1) which is arranged at a distance from the substrate (5) and is connected to the substrate (5) and/or a support body (6), which cannot move relative to the substrate (5), such that it can oscillate, with the result that a gap whose width can be varied by oscillations of the mass element (1) exists between the mass element (1) and the substrate (5). At least one depression and/or at least one bushing, which is used to reduce the damping of the oscillation of the mass element by the gas or plasma surrounding the mass element (1), is/are situated in that area of the substrate (5) which borders the gap. The sensor element is used, in particular, in pressure sensors for measuring pressures in the vacuum area. Maximum pressures into the range of atmospheric air pressure can be detected using the sensor element according to the invention as a pressure sensor. The lowest pressures to be determined are in the range of 10<SUP>-6</SUP> mbar.
IPC 8 full level
G01L 9/00 (2006.01); G01L 21/22 (2006.01)
CPC (source: EP US)
G01L 21/22 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007134714 A1 20071129; DE 102006024381 B3 20071206; EP 2021756 A1 20090211; JP 2009537831 A 20091029; US 2010024562 A1 20100204; US 8186225 B2 20120529
DOCDB simple family (application)
EP 2007004078 W 20070509; DE 102006024381 A 20060524; EP 07725001 A 20070509; JP 2009511361 A 20070509; US 30187407 A 20070509