Global Patent Index - EP 2021756 A1

EP 2021756 A1 2009-02-11 - MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE

Title (en)

MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE

Title (de)

MEMS VAKUUMSENSOR NACH DEM REIBUNGSPRINZIP

Title (fr)

CAPTEUR MEMS DANS LE VIDE SELON LE PRINCIPE DE FRICTION

Publication

EP 2021756 A1 (DE)

Application

EP 07725001 A

Priority

  • EP 2007004078 W
  • DE 102006024381 A

Abstract (en)

[origin: WO2007134714A1] The invention relates to a pressure-measuring sensor element having a substrate (5) and at least one mass element (1) which is arranged at a distance from the substrate (5) and is connected to the substrate (5) and/or a support body (6), which cannot move relative to the substrate (5), such that it can oscillate, with the result that a gap whose width can be varied by oscillations of the mass element (1) exists between the mass element (1) and the substrate (5). At least one depression and/or at least one bushing, which is used to reduce the damping of the oscillation of the mass element by the gas or plasma surrounding the mass element (1), is/are situated in that area of the substrate (5) which borders the gap. The sensor element is used, in particular, in pressure sensors for measuring pressures in the vacuum area. Maximum pressures into the range of atmospheric air pressure can be detected using the sensor element according to the invention as a pressure sensor. The lowest pressures to be determined are in the range of 10<SUP>-6</SUP> mbar.

IPC 8 full level (invention and additional information)

G01L 9/00 (2006.01); G01L 21/22 (2006.01)

CPC (invention and additional information)

G01L 21/22 (2013.01)

Citation (search report)

See references of WO 2007134714A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

WO 2007134714 A1 20071129; DE 102006024381 B3 20071206; EP 2021756 A1 20090211; JP 2009537831 A 20091029; US 2010024562 A1 20100204; US 8186225 B2 20120529

INPADOC legal status


2012-08-22 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20120225

2011-11-09 [DAX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT (TO ANY COUNTRY) (DELETED)

2011-03-16 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20110214

2009-02-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20080331

2009-02-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-11 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL BA HR MK RS