EP 2021874 A1 20090211 - CHUCKS FOR RETICLES AND OTHER PLANAR BODIES
Title (en)
CHUCKS FOR RETICLES AND OTHER PLANAR BODIES
Title (de)
SPANNVORRICHTUNGEN FÜR FOTOMASKEN UND ANDERE PLANARE KÖRPER
Title (fr)
MANDRINS DESTINÉS À DES RÉTICULES ET AUTRES CORPS PLANAIRES
Publication
Application
Priority
- JP 2007060740 W 20070521
- US 80186606 P 20060519
Abstract (en)
[origin: WO2007136123A1] Devices are disclosed for holding and moving a planar body such as a reticle (25) as used, for example, in microlithography. An exemplary device includes a stage (12) and a body chuck. The stage has a movable support surface. A proximal region (18a, 18b) of a first membrane (16a, 16b) is mounted to the support surface (17a, 17b). A distal region (20a, 20b) of the first membrane extends from the support surface and is coupled to the chuck (22a, 22b) such that the first membrane at least partially supports the chuck. The chuck includes a surface from which multiple pins (44) extend. The surface is situated at the distal region. The pins are arrayed to contact and support a respective region of the body. The pin arrangement is configured such that, during movements of the chuck imparted by the support surface, body slippage relative to the pins due to forces caused by the movement is substantially uniform at each pin.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR)
G03F 7/707 (2013.01 - EP KR); G03F 7/70708 (2013.01 - KR); G03F 7/70716 (2013.01 - KR); G03F 7/70733 (2013.01 - KR); G03F 7/70783 (2013.01 - EP KR); H01L 21/6838 (2013.01 - KR)
Citation (search report)
See references of WO 2007136123A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007136123 A1 20071129; EP 2021874 A1 20090211; JP 2009537966 A 20091029; KR 20090018916 A 20090224; TW 200807171 A 20080201
DOCDB simple family (application)
JP 2007060740 W 20070521; EP 07744174 A 20070521; JP 2008553564 A 20070521; KR 20087028197 A 20081119; TW 96118102 A 20070521