Global Patent Index - EP 2021874 A1

EP 2021874 A1 2009-02-11 - CHUCKS FOR RETICLES AND OTHER PLANAR BODIES

Title (en)

CHUCKS FOR RETICLES AND OTHER PLANAR BODIES

Title (de)

SPANNVORRICHTUNGEN FÜR FOTOMASKEN UND ANDERE PLANARE KÖRPER

Title (fr)

MANDRINS DESTINÉS À DES RÉTICULES ET AUTRES CORPS PLANAIRES

Publication

EP 2021874 A1 (EN)

Application

EP 07744174 A

Priority

  • JP 2007060740 W
  • US 80186606 P

Abstract (en)

[origin: WO2007136123A1] Devices are disclosed for holding and moving a planar body such as a reticle (25) as used, for example, in microlithography. An exemplary device includes a stage (12) and a body chuck. The stage has a movable support surface. A proximal region (18a, 18b) of a first membrane (16a, 16b) is mounted to the support surface (17a, 17b). A distal region (20a, 20b) of the first membrane extends from the support surface and is coupled to the chuck (22a, 22b) such that the first membrane at least partially supports the chuck. The chuck includes a surface from which multiple pins (44) extend. The surface is situated at the distal region. The pins are arrayed to contact and support a respective region of the body. The pin arrangement is configured such that, during movements of the chuck imparted by the support surface, body slippage relative to the pins due to forces caused by the movement is substantially uniform at each pin.

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01)

CPC (invention and additional information)

G03F 7/70783 (2013.01); G03F 7/707 (2013.01)

Citation (search report)

See references of WO 2007136123A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

WO 2007136123 A1 20071129; EP 2021874 A1 20090211; JP 2009537966 A 20091029; KR 20090018916 A 20090224; TW 200807171 A 20080201

INPADOC legal status


2015-12-18 [REG HK WD] APPLICATIONS WITHDRAWN, DEEMED TO BE WITHDRAWN, OR REFUSED AFTER PUBLICATION IN HONG KONG

- Document: HK 1127931

2011-03-30 [18W] APPLICATION WITHDRAWN

- Effective date: 20110214

2010-07-28 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: NIKON CORPORATION

2009-10-09 [REG HK DE] REQUESTS TO DESIGNATE PATENT IN HONG KONG

- Document: HK 1127931

2009-02-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20081202

2009-02-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-11 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL BA HR MK RS