Global Patent Index - EP 2024136 A2

EP 2024136 A2 2009-02-18 - WAFER DE-CHUCKING

Title (en)

WAFER DE-CHUCKING

Title (de)

LÖSEN VON WAFERN

Title (fr)

DE-CHUCKING DE PLAQUETTE

Publication

EP 2024136 A2 (EN)

Application

EP 07735709 A

Priority

  • IB 2007051599 W
  • EP 06300423 A
  • EP 07735709 A

Abstract (en)

[origin: WO2007125511A2] A carrier head (100) for a CMP tool, wherein the membrane (108) defining a chamber with a contact surface (102) of the carrier head (100) has a number of integral tubes (110) termining in openings coupled directly to the substrate (106), in addition to a main fluid flow passage (104) coupled to the chamber defined by the membrane (108). In use, during loading and polishing, a vacuum is applied to the main fluid flow passage (104) and the tubes (110) to hold the substrate (106) in flat engagement with the membrane (108) and contact surface (102). In order to unload the substrate (106), fluid pressure is applied to the substrate (106) via the tubes (110), whilst maintaining the application of the vacuum via the main fluid flow passage (104) so as to minimise bending and breakage of the substrate (106).

IPC 8 full level (invention and additional information)

B24B 37/30 (2012.01)

CPC (invention and additional information)

B24B 37/30 (2013.01)

Citation (search report)

See references of WO 2007125511A3

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

WO 2007125511 A2 20071108; WO 2007125511 A3 20080221; CN 101484277 A 20090715; EP 2024136 A2 20090218; JP 2009535836 A 20091001; US 2009186560 A1 20090723

INPADOC legal status


2009-12-23 [18W] WITHDRAWN

- Effective date: 20091116

2009-08-12 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20090714

2009-02-18 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20081202

2009-02-18 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-18 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Countries: AL BA HR MK RS