Global Patent Index - EP 2027302 A1

EP 2027302 A1 2009-02-25 - SPUTTER TARGET WITH SPUTTER MATERIAL BASED ON TIO2, AND A PRODUCTION METHOD

Title (en)

SPUTTER TARGET WITH SPUTTER MATERIAL BASED ON TIO2, AND A PRODUCTION METHOD

Title (de)

SPUTTERTARGET MIT EINEM SPUTTERMATERIAL AUF BASIS TIO2 SOWIE HERSTELLVERFAHREN

Title (fr)

CIBLE DE PULVÉRISATION AVEC UN MATÉRIAU DE PULVÉRISATION À BASE DE TIO2 AINSI QUE PROCÉDÉ DE FABRICATION

Publication

EP 2027302 A1 (DE)

Application

EP 07725867 A

Priority

  • EP 2007005010 W
  • DE 102006027029 A

Abstract (en)

[origin: WO2007141003A1] The invention relates to a sputter target, with sputter material based on TiO<SUB>2</SUB> which has 15-60 mol % of Nb<SUB>2</SUB>0s. The invention further relates to a method for the production of a sputter target consisting of the following steps: - mixture of TiO<SUB>2</SUB> and Nb<SUB>2</SUB>O<SUB>5</SUB> powder in liquid slurry - spraying of this slurry to cause the TiO<SUB>2</SUB>-Nb<SUB>2</SUB>O<SUB>5</SUB> mixed oxide mixture to granulate - plasma spraying of this granulated mixture onto the base body of a sputter target.

IPC 8 full level (invention and additional information)

C23C 14/34 (2006.01)

CPC (invention and additional information)

C23C 14/3414 (2013.01); C04B 35/46 (2013.01); C04B 35/462 (2013.01); C04B 35/495 (2013.01); C04B 35/62695 (2013.01); C04B 2235/3232 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/786 (2013.01)

Citation (search report)

See references of WO 2007141003A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

DE 102006027029 A1 20071213; DE 102006027029 B4 20100930; CN 101460652 A 20090617; EP 2027302 A1 20090225; JP 2009540112 A 20091119; US 2009183987 A1 20090723; WO 2007141003 A1 20071213

INPADOC legal status


2012-02-22 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20110906

2011-03-30 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20110223

2009-02-25 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20081209

2009-02-25 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-25 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL BA HR MK RS