EP 2027435 A1 20090225 - MASS-SENSITIVE THIN-FILM RESONATORS FOR LAYER THICKNESS MEASURING SYSTEMS
Title (en)
MASS-SENSITIVE THIN-FILM RESONATORS FOR LAYER THICKNESS MEASURING SYSTEMS
Title (de)
MASSENSENSITIVE DÜNNSCHICHTRESONATOREN FÜR SCHICHTDICKENMASSSYSTEME
Title (fr)
RÉSONATEURS À COUCHES MINCES SENSIBLES À LA MASSE POUR DES SYSTÈMES DE MESURE D'ÉPAISSEUR DE COUCHE
Publication
Application
Priority
- EP 2007004881 W 20070601
- DE 102006026308 A 20060602
- DE 102006054348 A 20061117
Abstract (en)
[origin: WO2007140943A1] The present invention relates to a layer thickness sensor for monitoring deposition processes and to a method for monitoring layer deposition processes in microsystem technology and nanotechnology. In order to provide an improved sensor which makes it possible to determine layer thicknesses in the region of less than approximately 0.2 nm, the invention proposes using mass-sensitive, piezoelectric thin-film resonators which are polarized both longitudinally and transversally for such layer thickness measuring systems. Temperature compensation can be additionally carried out by exciting at least two different oscillation modes at different frequencies and with a different temperature response and by means of corresponding calculation.
IPC 8 full level
CPC (source: EP)
G01B 7/066 (2013.01); H03H 9/02102 (2013.01)
Citation (search report)
See references of WO 2007140943A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
DE 102006054348 A1 20071206; DE 102006054348 B4 20130404; EP 2027435 A1 20090225; WO 2007140943 A1 20071213; WO 2007140943 A8 20080515
DOCDB simple family (application)
DE 102006054348 A 20061117; EP 07725761 A 20070601; EP 2007004881 W 20070601