Global Patent Index - EP 2027597 A1

EP 2027597 A1 2009-02-25 - INSULATION LAYER MATERIAL FOR MICROELECTRONICS

Title (en)

INSULATION LAYER MATERIAL FOR MICROELECTRONICS

Title (de)

ISOLATIONSSCHICHTMATERIAL FÜR DIE MIKROELEKTRONIK

Title (fr)

MATÉRIAU À COUCHE ISOLANTE POUR LA MICROÉLECTRONIQUE

Publication

EP 2027597 A1 (DE)

Application

EP 07785816 A

Priority

  • EP 2007005203 W
  • DE 102006027880 A

Abstract (en)

[origin: WO2007141048A1] The invention deals with the fields of microelectronics and material technology and relates to an insulation layer material for microelectronics which can be used, for example, in integrated circuits as a dielectric between copper conductor tracks. The invention addresses the problem of providing an insulation layer material for microelectronics which has a dielectricity constant of k< 2 whilst also having good mechanical properties. The problem is solved with an insulation layer material for microelectronics which consists of a plurality of fluorinated carbon nanotubes which are connected to a network, at least at certain points, by means of physical and/or chemical connections, using a bonding agent.

IPC 8 full level (invention and additional information)

H01L 21/312 (2006.01)

CPC (invention and additional information)

H01L 21/3127 (2013.01); B82Y 10/00 (2013.01); H01L 21/0212 (2013.01); H01L 21/02203 (2013.01); H01L 51/0048 (2013.01)

Citation (search report)

See references of WO 2007141048A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA HR MK RS

EPO simple patent family

DE 102006027880 A1 20071213; DE 102006027880 B4 20081127; EP 2027597 A1 20090225; WO 2007141048 A1 20071213

INPADOC legal status


2010-04-07 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20090923

2009-10-21 [RAP1] TRANSFER OF RIGHTS OF AN APPLICATION

- Owner name: LEIBNIZ-INSTITUT FUER FESTKOERPER- UND WERKSTOFFFO

2009-04-01 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: HERMANN, HELMUT

2009-04-01 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SEIFERT, GOTTHART

2009-04-01 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: TAESCHNER, CHRISTINE

2009-04-01 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: ZSCHECH, EHRENFRIED

2009-02-25 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20081204

2009-02-25 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

2009-02-25 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL BA HR MK RS