EP 2030222 A1 20090304 - METHOD AND DEVICE FOR REMOVING POLLUTION FROM A CONFINED ENVIRONMENT
Title (en)
METHOD AND DEVICE FOR REMOVING POLLUTION FROM A CONFINED ENVIRONMENT
Title (de)
VERFAHREN UND VORRICHTUNG ZUR ENTFERNUNG VON VERSCHMUTZUNG AUS EINER BEGRENZTEN UMGEBUNG
Title (fr)
PROCEDE ET DISPOSITIF DE DEPOLLUTION D'ENVIRONNEMENT CONFINE
Publication
Application
Priority
- FR 2007051328 W 20070524
- FR 0604668 A 20060524
Abstract (en)
[origin: WO2007135347A1] The subject of the present invention is a method for removing pollution from a confined environment containing an interior space bounded by a wall, involving the following steps: the confined environment which has a leak is placed in a sealed chamber comprising means of introducing a gas and means of pumping a gas; the gas contained in the chamber and the gas contained inside the space are simultaneously pumped through the leak so that the pressure difference across the wall is always below a wall-damaging threshold. Another subject of the invention is a device for removing pollution from a confined environment comprising: a pollution removal chamber able to contain the confined environment; means of introducing a purging gas; means of pumping a gas with variable pumping capacity; means for controlling the pumping rate; means for monitoring the pressure difference between the inside and the outside of the environment.
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR US)
H01L 21/67017 (2013.01 - EP KR US); H01L 21/67109 (2013.01 - KR); H01L 21/67201 (2013.01 - KR); H01L 21/67253 (2013.01 - EP KR US); H01L 21/67389 (2013.01 - EP KR US); Y10T 137/0419 (2015.04 - EP US); Y10T 137/6579 (2015.04 - EP US)
Citation (search report)
See references of WO 2007135347A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2007135347 A1 20071129; CN 101501817 A 20090805; CN 101501817 B 20131016; EP 2030222 A1 20090304; FR 2901546 A1 20071130; FR 2901546 B1 20101015; JP 2009538000 A 20091029; JP 5274450 B2 20130828; KR 101202551 B1 20121119; KR 20090017633 A 20090218; SG 172620 A1 20110728; US 2009263216 A1 20091022; US 8151816 B2 20120410
DOCDB simple family (application)
FR 2007051328 W 20070524; CN 200780027099 A 20070524; EP 07766098 A 20070524; FR 0604668 A 20060524; JP 2009511561 A 20070524; KR 20087031317 A 20070524; SG 2011037074 A 20070524; US 22758707 A 20070524