EP 2030490 B1 20160706 - METHOD AND APPARATUS FOR GENERATING A PLASMA AND USE OF THE SAME
Title (en)
METHOD AND APPARATUS FOR GENERATING A PLASMA AND USE OF THE SAME
Title (de)
VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN EINES PLASMAS SOWIE VERWENDUNG DERSELBEN
Title (fr)
PROCÉDÉ ET DISPOSITIF DE GÉNÉRATION DE PLASMA ET LEUR UTILISATION
Publication
Application
Priority
- EP 2007004512 W 20070522
- DE 102006027853 A 20060616
Abstract (en)
[origin: WO2007144061A1] The invention relates to a method and an apparatus for generating a plasma (9) in a working vacuum chamber, in which an arc discharge is generated between a hollow cathode (1) and an anode (4), and the hollow cathode (1) is arranged in a magnetic field (6) which, at least in a region penetrating the hollow cathode (1), is formed with field lines that extend essentially parallel to the axis of the hollow cathode, wherein the anode (4) is constructed in such a way that this encloses the hollow cathode (1) at least on the side from which the electrons exit, and the strength of the magnetic field (6) is set to such a level that by reducing the flow (7) of a gas flowing through the hollow cathode (1) the plasma density in the working vacuum chamber is increased.
IPC 8 full level
H01J 37/32 (2006.01); H05H 1/50 (2006.01)
CPC (source: EP)
H01J 37/32055 (2013.01); H01J 37/32596 (2013.01); H01J 37/3266 (2013.01); H01J 37/3405 (2013.01); H05H 1/50 (2013.01)
Citation (examination)
WO 2006003374 A2 20060112 - BOC GROUP PLC [GB], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006027853 A1 20071220; DE 102006027853 B4 20120614; EP 2030490 A1 20090304; EP 2030490 B1 20160706; WO 2007144061 A1 20071221
DOCDB simple family (application)
DE 102006027853 A 20060616; EP 07725418 A 20070522; EP 2007004512 W 20070522