EP 2032974 A1 20090311 - METHOD AND APPARATUS FOR OPTICALLY CHARACTERIZING THE DOPING OF A SUBSTRATE
Title (en)
METHOD AND APPARATUS FOR OPTICALLY CHARACTERIZING THE DOPING OF A SUBSTRATE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR OPTISCHEN CHARAKTERISIERUNG EINER SUBSTRATDOTIERUNG
Title (fr)
MÉTHODE ET APPAREIL DE CARACTÉRISATION OPTIQUE DU DOPAGE D'UN SUBSTRAT
Publication
Application
Priority
- FR 2007000992 W 20070614
- FR 0605329 A 20060614
Abstract (en)
[origin: WO2007144514A1] The invention relates to an optical characterization method that includes a step of evaluating the doping of a substrate (SUB) by means of a reflected beam coming from a light source, this method being carried out with an apparatus comprising: - this light source (LAS) for producing an incident beam (I) along an axis of incidence; - a first detector (DET1) for measuring the power of this reflected beam (R) along an axis of reflection, the axis of incidence and the axis of reflection intercepting at a measurement point and making a non-zero measurement angle (2T); and - a polarizer (POL) placed in the path of the incident beam (I). Furthermore the light source (LAS) is monochromatic. The invention also relates to an ion implanter equipped with this apparatus.
IPC 8 full level
G01N 21/95 (2006.01); H01L 21/66 (2006.01)
CPC (source: EP KR US)
G01N 21/55 (2013.01 - EP US); G01N 21/95 (2013.01 - KR); G01N 21/9501 (2013.01 - EP US); H01L 22/00 (2013.01 - KR); G01N 2021/215 (2013.01 - EP US)
Citation (search report)
See references of WO 2007144514A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
FR 2902575 A1 20071221; FR 2902575 B1 20080905; CN 101501475 A 20090805; EP 2032974 A1 20090311; KR 20090028629 A 20090318; US 2010012031 A1 20100121; WO 2007144514 A1 20071221
DOCDB simple family (application)
FR 0605329 A 20060614; CN 200780029809 A 20070614; EP 07803753 A 20070614; FR 2007000992 W 20070614; KR 20097000788 A 20090114; US 30844607 A 20070614